潘扶民

潘扶民 Pan, Fu-Ming

電子郵件/E-mail:fmpan@faculty.nctu.edu.tw

服務單位/Department:College of Engineering / Degree Program of Semiconductor Material and Process Equipment

著作期間/Publish Period:1992 - 2014-05-01

著作統計/Statistics

Article(72)
Patents(2)
Plan(18)
Thesis(66)

Article

序號
No.
標題
Title
著作日期
Date
1 Dark current suppression of amorphous selenium based photosensors by the ZnO hole blocking layer
2014-05-01
2 Double-metal-gate nanocrystalline Si thin film transistors with flexible threshold voltage controllability
2013-11-11
3 Multi-functional stacked light-trapping structure for stabilizing and boosting solar-electricity efficiency of hydrogenated amorphous silicon solar cells
2013-08-12
4 PdO Nanoflake Thin Films for CO Gas Sensing at Low Temperatures
2013-08-01
5 Carbon-Coated Porous Aluminum Oxides Used as Spacer Overlayers to Reduce Secondary Electron Emission for Field Emission Display Applications
2013-07-01
6 Temperature-dependent electrical and photo-sensing properties of horizontally-oriented carbon nanotube networks synthesized by sandwich-growth microwave plasma chemical vapor deposition
2013-02-01
7 Enhanced photocatalytic decomposition of methylene blue by the heterostructure of PdO nanoflakes and TiO2 nanoparticles
2012-12-15
8 UV-Visible Light-Trapping Structure of Loosely Packed Submicrometer Silica Sphere for Amorphous Silicon Solar Cells
2012-07-01
9 Effects of the PdO nanoflake support on electrocatalytic activity of Pt nanoparticles toward methanol oxidation in acidic solutions
2012-06-15
10 Growth mode transition of atomic layer deposited Al2O3 on porous TiO2 electrodes of dye-sensitized solar cells
2012-01-01
11 Electrocatalytic activity of Pt nanoparticles on a karst-like Ni thin film toward methanol oxidation in alkaline solutions
2011-05-18
12 Photovoltaic Performance of HWCVD Deposited mu c-Si:H Solar Cells Using Graded Hydrogen Dilution Window-Layer
2011-01-01
13 In Situ Two-Step Plasma Enhanced Atomic Layer Deposition of Ru/RuNx Barriers for Seedless Copper Electroplating
2011-01-01
14 Growth and photoresponse study of PdO nanoflakes reactive-sputter deposited on SiO(2) 2010-09-01
15 Coverage Analysis for the Core/Shell Electrode of Dye-Sensitized Solar Cells
2010-06-03
16 Electrocatalytic activity of Pt nanoparticles electrodeposited on amorphous carbon-coated silicon nanocones
2010-02-01
17 Effect of Surface Reduction Treatments of Plasma-Enhanced Atomic Layer Chemical Vapor Deposited TaN(x) on Adhesion with Copper 2010-01-01
18 Pore sealing of mesoporous silica low-k dielectrics by oxygen and argon plasma treatments
2009-11-01
19 Mechanistic study of cobalt catalyzed growth of carbon nanofibers in a confined space by plasma-assisted chemical vapor deposition
2009-10-01
20 Electrocatalytic activity of Pt nanoparticles deposited on porous TiO(2) supports toward methanol oxidation 2009-09-28
21 Evolution of Fluorine Content with Precipitate Formation in Fluorine-Doped Silicon Oxide
2009-08-01
22 Interfacial energy levels and related properties of atomic-layer-deposited Al(2)O(3) films on nanoporous TiO(2) electrodes of dye-sensitized solar cells 2009-07-29
23 Growth of Pagoda-Topped Tetragonal Copper Nanopillar Arrays
2009-07-01
24 Pulse Electrodeposition of Iridium Oxide on Silicon Nanotips for Field Emission study 2009-05-01
25 Facile approach to the synthesis of 3D platinum nanoflowers and their electrochemical characteristics
2009-01-01
26 Growth and Field Emission of Reactive Sputtered Pd-PdO Core-Shell Nanoflakes on Platinum
2009-01-01
27 Nanogap Structure Optimization and Electron Emission Study of the Surface Conduction Electron Emitter Fabricated by Palladium Hydrogenation
2009-01-01
28 Effect of process variation on field emission characteristics in surface-conduction electron emitters
2008-07-01
29 Effects of Hydrogen Plasma Treatment on Field-Emission Characteristics of Palladium Nanogap Emitters
2008-01-01
30 Facile synthesis of continuous Pt island networks and their electrochemical properties for methanol electrooxidation
2008-01-01
31 Fabrication and field-emission characteristics of TiN nanorods with a concave top surface 2008-01-01
32 Field-emission properties of novel palladium nanogaps for surface conduction electron-emitters
2007-11-28
33 Nanogap formation by palladium hydrogenation for surface conduction electron emitters fabrication
2007-04-16
34 Field emission property of CNT field emitters in the triode structure with anodic aluminum oxide template 2007-01-01
35 Amorphous carbon coated silicon nanotips fabricated by MPCVD using anodic aluminum oxide as the template
2007-01-01
36 Effect of trimethylsilylation on the film stress of mesoporous silica ultralow-k film stacks 2006-01-01
37 Thermal stability of trimethylsilylated mesoporous silica thin films as the ultralow-k dielectric for copper interconnects
2005-09-01
38 The preparation of mesoporous silica ultra-low-k film using ozone ashing treatment
2005-07-01
39 Field emission of carbon nanotubes on anodic aluminum oxide template with controlled tube density
2005-03-21
40 Emission of bright blue light from mesoporous silica with dense Si (Ge) nanocrystals 2005-01-01
41 Fabrication and field emission characteristics of highly ordered titanium oxide nanodot arrays 2005-01-01
42 Preparation and phase transformation of highly ordered TiO2 nanodot arrays on sapphire substrates
2004-05-10
43 Alkylation of nanoporous silica thin films by high density plasma chemical vapor deposition of a-SIC : H
2004-05-01
44 Stable blue luminescence from mesoporous silica films 2004-01-01
45 Influence of annealing sequence on p(+)/n junction images studied by scanning capacitance microscopy 2004-01-01
46 Selective growth of carbon nanotube on scanning probe tips by microwave plasma chemical vapor deposition
2004-01-01
47 Microstructure and mechanical properties of surfactant templated nanoporous silica thin films: Effect of methylsilylation
2003-06-01
48 Self-organized titanium oxide nanodot arrays by electrochemical anodization
2003-04-28
49 Trimethylchlorosilane treatment of ultralow dielectric constant material after photoresist removal processing
2002-10-01
50 Observation of differential capacitance images on slightly iron-contaminated p-type silicon 2002-08-01
51 Effective repair to ultra-low-k dielectric material (k-2.0) by hexamethyidisilazane treatment
2002-07-01
52 Eliminating dielectric degradation of low-k organosilicate glass by trimethylchlorosilane treatment
2002-07-01
53 Preventing dielectric damage of low-k organic siloxane by passivation treatment
2002-04-01
54 Effective strategy for porous organosilicate to suppress oxygen ashing damage 2002-03-01
55 Cu contamination effect in oxynitride gate dielectrics
2001-11-01
56 An investigation of scanning capacitance microscopy on iron-contaminated p-type silicon 2001-09-01
57 The strong degradation of 30 angstrom gate oxide integrity contaminated by copper
2001-04-01
58 The effect of copper on gate oxide integrity
2000-11-01
59 Annealing effects on the interfacial reactions of Ni on Si0.76Ge0.24 and Si1-x-yGexCy
2000-01-01
60 The novel improvement of low dielectric constant methylsilsesquioxane by N2O plasma treatment
1999-10-01
61 Characterization of Si1-x-yGexCy films grown by C+ implantation and subsequent pulsed laser annealing
1999-07-15
62 Effects of morphology and surface characteristics of poly(imide siloxane)s and deep UV/O-3 surface treatment on the interfacial adhesion of poly(imide siloxane)/alloy-42 leadframe joints
1999-07-01
63 Effects of isolation materials on facet formation for silicon selective epitaxial growth 1997-10-20
64 Effects of isolation oxides on undercut formation and electrical characteristics for silicon selective epitaxial growth
1997-06-01
65 Characterization of boron silicide layer deposited by ultrahigh-vacuum chemical-vapor deposition 1996-11-01
66 Schottky contact and the thermal stability of Ni on n-type GaN 1996-08-01
67 A bilayer Ti/Ag ohmic contact for highly doped n-type GaN films 1996-01-08
68 A COMPREHENSIVE STUDY OF SUPPRESSION OF BORON PENETRATION BY AMORPHOUS-SI GATE IN P+-GATE PMOS DEVICES
1995-12-01
69 STUDY OF SCHOTTKY BARRIERS ON N-TYPE GAN GROWN BY LOW-PRESSURE METALORGANIC CHEMICAL-VAPOR-DEPOSITION 1995-10-30
70 EFFECTS OF DRY-ETCHING DAMAGE REMOVAL ON LOW-TEMPERATURE SILICON SELECTIVE EPITAXIAL-GROWTH 1995-10-01
71 SE-DOPED GAN FILMS GROWN BY LOW-PRESSURE METALORGANIC CHEMICAL-VAPOR-DEPOSITION
1995-10-01
72 EFFECT OF OXYGEN IMPURITY ON MICROSTRUCTURE AND BORON PENETRATION IN A BF2+ IMPLANTED LPCVD STACKED AMORPHOUS-SILICON P(+) GATED PMOS CAPACITOR
1995-07-01

Patents

序號
No.
標題
Title
著作日期
Date
1 控制奈米碳管管束密度的方法與奈米碳管的製造方法
2008-07-21
2 控制奈米碳管管束密度的方法與奈米碳管的製造方法
2006-06-01

Plan

序號
No.
標題
Title
著作日期
Date
1 高CO選擇比之PdO奈米片薄膜低溫氣體感測技術應用研究 2014
2 非晶質硒應用於雪崩式倍增光感測器之研究 2014
3 高CO選擇比之PdO奈米片薄膜低溫氣體感測技術應用研究 2013
4 活性濺鍍氧化鈀奈米片薄膜及低溫CO氣體感測器應用研究 2012
5 活性濺鍍氧化鈀奈米片薄膜及低溫CO氣體感測器應用研究 2011
6 金屬氫化法製作奈米裂隙 --- 表面傳導電子發射顯示技術應用
2010
7 活性濺鍍氧化鈀奈米片薄膜及低溫CO氣體感測器應用研究 2010
8 以奈米孔陽極氧化鋁(AAO)版模法製作電子場發射奈米結構材料
2009
9 金屬氫化法製作奈米裂隙---表面傳導電子發射顯示技術應用
2009
10 以奈米孔陽極氧化鋁(AAO)版模法製作電子場發射奈米結構材料 2008
11 金屬氫化法製作奈米裂隙---表面傳導電子發射顯示技術應用 2008
12 以奈米孔陽極氧化鋁(AAO)版模法製作電子場發射奈米結構材料 2007
13 電漿輔助原子層化學氣相沉積在銅連線結構之多孔性超低介電層之製程整合應用研究(I) 2006
14 以自組裝奈米孔洞SiO/sub 2/作為次70 nm IC技術之超低介電薄膜之應用研究(III)
2005
15 奈米解析度記錄媒體及其他應用之包覆合金碳奈米結構陣列,其製造、機械/熱性質及製程特徵之研究---子計畫三:奈米結構沉積製程與積體電路製程之整合(III)
2005
16 以自組裝奈米孔洞SiO2作為次70 nm IC技術之超低介電薄膜之應用研究(II)
2004
17 奈米解析度記錄媒體及其他應用之包覆合金碳奈米結構陣列,其製造、機械/熱性質及製程特徵之研究---子計畫三:奈米結構沉積製程與積體電路製程之整合(II)
2004
18 矽晶圓高效減廢超洗淨技術研究 1999

Proceedings Paper

序號
No.
標題
Title
著作日期
Date
1 Electrocatalytic activity of Pt nanoparticles on karst-rock shaped Ni thin films toward methanol and ethanol oxidation in alkaline solutions
2010-01-01
2 Ordered silicon nanocones as a highly efficient platinum catalyst support for direct methanol fuel cells
2008-08-01
3 Analysis of field emission of fabricated nanogap in Pd strips for surface conduction electron-emitter displays
2008-04-01
4 Field emission property of carbon nanotube field emitters in triode structure fabricated with anodic aluminum oxide templates
2008-04-01
5 Morphology effect on field emission property of carbon nanotube emitters in triode structure 2008-01-01
6 Novel surface conduction electron emitter (SCE) nanogaps for field emission displays 2008-01-01
7 Growth of carbon nanotube field emitters in the triode structure using anodic aluminum oxide as the template
2007-04-01
8 Nanogap fabrication on palladium electrodes for field emission display applications 2007-01-01
9 Three-dimensional simulation of novel surface conduction electron-emitters 2007-01-01
10 Anodic-aluminum-oxide templated carbon nanotubes in the field emission triode 2007-01-01
11 Numerical simulation of field emission in the surface conduction electron-emitter display
2007-01-01
12 Effect of Process Variation on Field Emission Characteristic in Surface Conduction Electron-Emitters 2007-01-01
13 Tube number density control of carbon nanotubes on anodic aluminum oxide template
2005-03-01
14 Anodic aluminum oxide as a template for CNT field emitters and AAO-CNT triode structure 2005-01-01
15 Anodic aluminum oxide template assisted growth of vertically aligned carbon nanotube arrays by ECR-CVD
2004-11-01
16 Stabilizing dielectric constant of fluorine-doped SiO2 film by N2O and NH3 plasma post-treatment
1997-10-31
17 Characterization of TiN film grown by low-pressure-chemical-vapor-deposition
1997-10-31
18 Anomalous selective tungsten growth by chemical vapor deposition 1996-01-01
19 Thermal stability and interaction between SiOF and Cu film 1996-01-01
20 Study of Schottky barriers on n-type GaN grown by LP-MOCVD 1995-01-01
21 DIAMOND FILM GROWTH ON CEMENTED TUNGSTEN CARBIDES STUDIED BY SEM, AES AND XPS 1992-11-23

Thesis

序號
No.
標題
Title
著作日期
Date
1 Study on amorphous carbon as the anode material for high power lithium ion batteries 2014
2 原子層化學氣相沉積法製備白金奈米粒以研究甲醇電催化氧化反應 2013
3 微結晶矽材料於電子及光電元件之應用 2013
4 感光性聚亞醯胺減量塗佈製程對積體電路鈍化層均勻性與品質之影響 2013
5 氫化非晶矽p-i-n光感測器之沉積製程對光電特性影響研究 2013
6 改善氮化鈦阻障層與鎢插塞之化學氣相沉積製程 以降低其電阻率之研究 2013
7 軟性有機互補式反相器有機薄膜電晶體其製備與最佳化 2013
8 利用雙加熱檢測系統進行靜態隨機存取記憶體故障分析 2013
9 Plasma enhanced atomic layer deposition of Pt nanoparticles for studying the size effect on the electrocatalytic activity toward methanol oxidation reaction 2013
10 化學浴沉積法製備孔洞性四氧化三鈷奈米片薄膜應用於一氧化碳氣體感測之特性研究 2013
11 反應性濺鍍氧化鈀奈米片薄膜對CO常壓感測之研究 2013
12 氧化鈀奈米片薄膜對CO與CH4低溫氣體感測特性之研究 2013
13 多壁碳奈米管輔助聚合物氣體感測器陣列於電子鼻系統之應用
2012
14 利用鈷摻雜優化Pt/ZnO/Pt電阻式記憶體之開關特性 2012
15 高壓金氧半場效電晶體臨界電壓飄移構因研究 2012
16 高增益雪崩式非晶硒疊層膜光感測器之氧化鋅電洞阻障層研究 2012
17 利用電漿輔助原子層沉積系統成長白金奈米顆粒於二氧化鈦基材─直接甲醇燃料電池陽極觸媒之應用 2011
18 溝槽型功率金氧半場效電晶體切換速率改善研究 2011
19 聚乙醯胺表面處理對覆晶封裝接合特性之影響研究 2011
20 化學機械研磨微刮傷發生原因與改善方法 2011
21 二氧化鈦奈米晶粒表面處理對染料敏化太陽能電池效率影響之研究 2011
22 氧化鈀奈米片薄膜對CO氣體感測特性研究 2011
23 高壓半導體元件淺溝槽隔離製程之差排改善及良率提昇研究 2011
24 高增益雪崩式非晶硒疊層膜光感測器研究 2011
25 氧化鋅奈米片薄膜應用於一氧化碳氣體感測之特性研究 2011
26 最佳化鋁箔電解條件以改進中高壓電容器之可靠性 2011
27 利用原子層化學氣相法在TiO2電極上沉積Al2O3覆層以改進染料敏化太陽能電池之光電效能
2010
28 氧化鈀奈米薄片之成長機制與光電特性之研究 2010
29 利用電漿輔助原子層氣相沉積法在多孔性超低介電薄膜製備銅導線擴散阻障層之研究 2010
30 以簡易製程合成碳奈米結構在場發射、電晶體與感測元件之應用 2010
31 沉積在金屬氧化物載體上之鉑金屬奈米粒對甲醇氧化反應之電催化特性研究
2010
32 金屬輔助奈米堆疊結構之開發及其在高性能薄膜電晶體非揮發性記憶體元件之應用 2010
33 場發射平面顯示器真空隔板新材料開發與電特性分析 2010
34 以自形成氧化錳薄膜應用於銅金屬化之擴散阻障層特性研究 2010
35 雙擴散金氧半場效電晶體崩潰電壓及漏電流之最佳化研究 2009
36 臨場蒸氣產生技術(ISSG)應用於鎢奈米點非揮發性記憶體之研究 2009
37 優選性氧化鈀金屬閘極以改進表面傳導電子場發射顯示器之發射效率 2009
38 PdO/TiO2半導體氧化物異質接合結構之有機分子光催化分解研究
2009
39 濕式清洗製程改善快閃記憶體金屬佈線與通道連接電阻降低研究
2009
40 電漿化學氣相沉積技術成長超低應力之紫外光可透性氮化矽薄膜
2009
41 鉑奈米顆粒沉積於鎳鐘乳石結構作為直接甲醇與乙醇燃料電池之陽極材料研究 2008
42 奈米結構性材料之製作與合成及其於直接甲醇燃料電池之應用
2008
43 增進鏡面光學損害抵抗能力於砷化鋁鎵高功率雷射二極體
2008
44 以陽極氧化鋁製作鈷奈米結構材料之研究 2008
45 鈀金屬陰極奈米裂縫製作及表面傳導電子發射元件技術之研究
2008
46 熱氧化法製作垂直二氧化鈦奈米柱及其光伏效能研究
2008
47 選擇性沉積碳奈米結構圖案之奈米操控與場效發射研究
2008
48 表面傳導電子發射元件顯示技術之研究 2008
49 利用PdO奈米片狀結構做為Pt觸媒擔體─直接甲醇燃料電池陽極觸媒之應用
2007
50 電泳沈積奈米碳管及其電子場發射特性研究 2007
51 利用電漿輔助原子層沉積法沉積之氮化鉭擴散阻障層及其與銅金屬之附著性研究
2007
52 電漿活化晶圓接合製程之研究 2006
53 離子植入製程監測方法之研究 2006
54 濺鍍鈀與氧化鈀薄膜應用於奈米裂隙電極製作研究
2006
55 多孔性二氧化矽薄膜表面電漿改質在奈米積體電路超低介電材料之應用研究
2006
56 利用陽極氧化鋁製備奈米結構電子場發射源 2006
57 鈀奈米裂縫製作及其在表面傳導電子發射顯示技術的應用
2006
58 介孔洞二氧化矽超低介電薄膜在積體電路技術之應用
2005
59 探討化學氣相沉積在先進動態隨機存取記憶體淺溝槽絕緣的填洞能力
2005
60 低介電常數奈米孔洞二氧化矽薄膜的乾式蝕刻特性研究
2005
61 以陽極氧化鋁輔助合成奈米碳管場發射陣列之研究
2005
62 以陽極氧化鋁模板在矽基材上輔助成長奈米結構材料
2004
63 超低介電常數奈米孔洞二氧化矽薄膜的應力研究
2004
64 記憶體元件電致發光的量測
2004
65 奈米碳管與氧化鈦奈米點之陽極氧化鋁模板輔助成長與電子場效發射
2004
66 利用電腦視覺技術作室內環境學習、路徑產生及自動車導引 1992