張立

張立 Chang, Li

電子郵件/E-mail:lichang@cc.nctu.edu.tw

服務單位/Department:College of Engineering / Degree Program of Semiconductor Material and Process Equipment

著作期間/Publish Period:1977-01-01 - 2014-10-03

著作統計/Statistics

Article(92)
Others(3)
Patents(9)
Plan(32)
Thesis(54)

Article

序號
No.
標題
Title
著作日期
Date
1 Heteroepitaxial growth of TiN film on MgO (100) by reactive magnetron sputtering 2014-10-03
2 Structural and nanoindentation studies of epitaxial titanium oxynitride (001) films grown on MgO(001) substrate
2014-07-25
3 Effect of In/Al ratios on structural and optical properties of InAlN films grown on Si(100) by RF-MOMBE
2014-05-01
4 Defects in nonpolar (13(4)over-bar0) ZnO epitaxial film grown on (114) LaAlO3 substrate
2014-03-01
5 Chemical vapor deposition of diamond on an adamantane-coated sapphire substrate
2014-01-01
6 Valley-dependent resonant inelastic transmission through a time-modulated region in graphene
2013-11-18
7 The role of the interface structure on the growth of nonpolar (10(1)over-bar0) and semipolar (11(2)over-bar(2)over-bar) ZnO on (112) LaAlO3 substrates
2013-10-15
8 Effect of Growth Temperature on Formation of Amorphous Nitride Interlayer between AlN and Si(111)
2013-08-01
9 Stability and etching of titanium oxynitride films in hydrogen microwave plasma
2013-07-01
10 Semipolar (11(2)over-bar(2)over-bar) ZnO thin films grown on LaAlO3-buffered LSAT (112) single crystals by pulsed laser deposition 2013-04-01
11 Defects in semipolar (11(2)over-bar(2)over-bar) ZnO grown on (112) LaAlO3/(La, Sr) (Al, Ta)O-3 substrate by pulsed laser deposition
2013-03-27
12 Interfacial structure of a-plane ZnO grown on r-plane sapphire by pulsed laser deposition
2013-03-01
13 Morphology evolution of a-plane ZnO films on r-plane sapphire with growth by pulsed laser deposition
2013-01-15
14 Structure and property of epitaxial titanium oxynitride grown on MgO(001) substrate by pulsed laser deposition
2013-01-15
15 Chemical vapor deposition of diamond on silicon substrates coated with adamantane in glycol chemical solutions
2013-01-01
16 Atomistic nucleation sites of Pt nanoparticles on N-doped carbon nanotubes
2013-01-01
17 Influence of V/III Flow Ratio on Growth of InN on GaN by PA-MOMBE
2013-01-01
18 Orthorhombic BiFeO3 2012-12-14
19 The cooling effect on structural, electrical, and optical properties of epitaxial a-plane ZnO:Al on r-plane sapphire grown by pulsed laser deposition
2012-10-08
20 Study of InN epitaxial films and nanorods grown on GaN template by RF-MOMBE
2012-08-21
21 Fabrication and structural property of diamond nano-platelet arrays on {111) textured diamond film
2012-05-01
22 Strain-driven phase boundaries in BiFeO(3) thin films studied by atomic force microscopy and x-ray diffraction 2012-01-17
23 How do InAs quantum dots relax when the InAs growth thickness exceeds the dislocation-induced critical thickness?
2012-01-01
24 Semipolar GaN Films on Prism Stripe Patterned a-Plane Sapphire Substrates
2012-01-01
25 Optical investigation of A-plane ZnO/ZnMgO multiple quantum wells grown by pulsed laser deposition
2011-12-01
26 Electron Emission Properties of Nitrogen-Induced Localized Defects in InAsN/GaAs Quantum Dots
2011-11-01
27 Enhanced Nucleation and Growth of Diamond Film on Si by CVD Using a Chemical Precursor
2011-08-18
28 Improving the photoluminescence properties of self-assembled InAs surface quantum dots by incorporation of antimony
2011-08-15
29 Nanoscale Structure and Mechanism for Enhanced Electromechanical Response of Highly Strained BiFeO(3) Thin Films 2011-07-26
30 Heteroepitaxial growth of InN on GaN intermediate layer by PA-MOMBE
2011-07-01
31 The influence of carbon addition on carbide characteristics and mechanical properties of CM-681LC superalloy using fine-grain process
2011-05-05
32 Effect of growth temperature on a-plane ZnO formation on r-plane sapphire
2011-05-01
33 Defects in m-plane ZnO epitaxial films grown on (112) LaAlO(3) substrate 2011-05-01
34 Growth of Semipolar InN(10(1)over-bar3) on LaAlO(3)(112) Substrate 2011-04-01
35 Epitaxial growth of titanium oxycarbide on MgO (001) substrates by pulsed laser deposition
2011-01-15
36 Electron delocalization of tensily strained GaAs quantum dots in GaSb matrix
2010-12-15
37 Optical characteristics of a-plane ZnO/Zn(0.8)Mg(0.2)O multiple quantum wells grown by pulsed laser deposition 2010-10-01
38 Bimodel onset strain relaxation in InAs quantum dots with an InGaAs capping layer
2010-08-30
39 Growth of 3C-SiC on Si(111) using the four-step non-cooling process
2010-08-02
40 Diamond plates on dome-like particles: preparation, characterization and field emission properties
2010-08-01
41 The effects of carbon content on the microstructure and elevated temperature tensile strength of a nickel-base superalloy
2010-06-25
42 Growth, microstructure, and field-emission properties of synthesized diamond film on adamantane-coated silicon substrate by microwave plasma chemical vapor deposition
2010-05-15
43 The synthesis of diamond films on adamantane-coated Si substrate at low temperature
2010-04-15
44 Etching of GaN by microwave plasma of hydrogen
2010-03-04
45 Chemical Precursor for the Synthesis of Diamond Films at Low Temperature
2010-01-01
46 Crystal Quality of 3C-SiC Influenced by the Diffusion Step in the Modified Four-Step Method
2010-01-01
47 Structural and optical properties of buried InAs/GaAs quantum dots on GaAsSb buffer layer
2009-09-21
48 Pulse Electrodeposition of Iridium Oxide on Silicon Nanotips for Field Emission study 2009-05-01
49 Epitaxy of m-plane ZnO on (112) LaAlO(3) substrate 2009-05-01
50 Strain relaxation in InAs self-assembled quantum dots induced by a high N incorporation
2008-11-15
51 Geometrical correlations of quantum dots in InAs/GaAs superlattice structure from electron tomography
2008-10-13
52 Growth of nonpolar (11(2)over-bar0) ZnO films on LaAlO(3) (001) substrates
2008-09-22
53 Effect of antimony incorporation on the density, shape, and luminescence of InAs quantum dots
2008-07-15
54 Growth of diamond nanoplatelets by CVD
2008-07-01
55 Atomic scale characterization of buried In(x)Ga(1-x)As quantum dots using pulsed laser atom probe tomography
2008-06-09
56 Investigations on highly stable thermal characteristics of a dilute In(0.2)Ga(0.8)AsSb/GaAs doped-channel field-effect transistor
2008-04-01
57 Growth and structural characterization of ZnO on Y2O3/YSZ by pulsed laser deposition
2008-03-15
58 Growth of a-plane ZnO thin films on LaAlO3(100) substrate by metal-organic chemical vapor deposition
2008-02-15
59 Effect of hot isostatic pressing on microstructure and mechanical properties of CM-681LC nickel-base superalloy using microcast
2008-01-01
60 Fabrication and field-emission characteristics of TiN nanorods with a concave top surface 2008-01-01
61 Relaxation-induced lattice misfits and their effects on the emission properties of InAs quantum dots
2007-09-05
62 Dislocation reduction in GaN grown on stripe patterned r-plane sapphire substrates 2007-07-09
63 Mechanism of microstructure evolution for the Cu/Ta/GaAs structure after thermal annealing
2007-04-01
64 Effect of gate sinking on the device performance, of the InGaP/AlGaAs/InGaAs enhancement-mode PHEMT
2007-02-01
65 A novel dilute antimony channel In0.2Ga0.8AsSb/GaAs HEMT
2007-02-01
66 Amorphous carbon coated silicon nanotips fabricated by MPCVD using anodic aluminum oxide as the template
2007-01-01
67 Chemical vapour deposition of oriented diamond nanocrystallites by a bias-enhanced nucleation method
2006-11-28
68 Magnetotransport properties, electronic structure, and microstructure of La0.7Sn0.3MnO3 thin films 2006-10-01
69 Strain relaxation and induced defects in InAsSb self-assembled quantum dots
2006-06-05
70 Crack-free GaN/AlN distributed Bragg reflectors incorporated with GaN/AlN superlattices grown by metalorganic chemical vapor deposition
2006-02-06
71 Effect of trimethylsilylation on the film stress of mesoporous silica ultralow-k film stacks 2006-01-01
72 Thermal stability of trimethylsilylated mesoporous silica thin films as the ultralow-k dielectric for copper interconnects
2005-09-01
73 Microstructural investigation of hexagonal-shaped diamond nanoplatelets grown by microwave plasma chemical vapor deposition
2005-07-15
74 Ultrafine platinum nanoparticles uniformly dispersed on arrayed CNx nanotubes with high electrochemical activity
2005-07-12
75 Growth of zinc oxide thin films on Y2O3/Si substrates by chemical vapor deposition
2005-02-15
76 Diamond nucleation on Ni3Al substrate using bias enhanced nucleation method
2005-02-01
77 Alkylation of nanoporous silica thin films by high density plasma chemical vapor deposition of a-SIC : H
2004-05-01
78 Pattern-dependent copper microcorrosion from CMP 2004-01-01
79 Bandgap mapping for III-V quantum well by electron spectroscopy imaging
2004-01-01
80 Study of titanium tungsten nitride and tungsten nitride Schottky contacts on n-GaN
2003-07-01
81 Microstructure and mechanical properties of surfactant templated nanoporous silica thin films: Effect of methylsilylation
2003-06-01
82 The performance of GaAs power MESFET's using backside copper metallization
2002-12-01
83 High power Al0.3Ga0.7As/In0.2Ga0.8As enhancement-mode PHEMT for low-voltage wireless communication systems
2002-08-29
84 Low-voltage-operation high-power-density AlGaAs/InGaAs enhancement-mode pseudomorphic high-electron-mobility transistor for personal handy-phone handset application
2002-01-15
85 Highly oriented diamond growth on positively biased Si substrates
2001-12-01
86 Observations of Al segregation around dislocations in AlGaN
2001-08-13
87 The effect of oxygen on the interfacial reactions of Cu/TaNx/Si multilayers
2001-08-01
88 Backside copper metallization of GaAs MESFETs using TaN as the diffusion barrier
2001-06-01
89 The effect of oxygen in the annealing ambient on interfacial reactions of Cu/Ta/Si multilayers
2001-06-01
90 Oxidation of Ta diffusion barrier layer for Cu metallization in thermal annealing
2001-06-01
91 Thermal stability of Cu/Ta/GaAs multilayers
2000-11-20
92 Microstructural investigation of oxidized Ni/Au ohmic contact to p-type GaN
1999-10-01

Others

序號
No.
標題
Title
著作日期
Date
1 Chemical polishing method of GaAs specimens for transmission electron microscopy
2010-01-01
2 Valence state map of iron oxide thin film obtained from electron spectroscopy imaging series
2007-01-01
3 SHIFTING OF PEAK GENERATION RATE IN DOUBLE-DRIFT SILICON IMPATT DIODES
1977-01-01

Patents

序號
No.
標題
Title
著作日期
Date
1 鑽石薄膜成長方法
2014-08-01
2 鑽石磊晶成長方式
2014-06-01
3 一種形成鑽石膜的成核方法
2014-05-01
4 以單晶氧化物作為基板成長纖鋅礦結構半導體非極性m面磊晶層之方法
2014-02-01
5 纖鋅礦結構材料之非極性晶面
2013-09-16
6 以水溶液製備金屬氧化物薄膜之方法
2013-02-11
7 以單晶氧化物作為基板成長纖鋅礦結構半導體非極性m面磊晶層之方法
2011-04-01
8 Method for growing non-polar m-plane epitaxial layer of wurtzite semiconductors on single crystal oxide substrates
2011-03-17
9 以水溶液製備金屬氧化物薄膜之方法
2010-06-01

Plan

序號
No.
標題
Title
著作日期
Date
1 化學氣相沉積鑽石之新技術研究 2014
2 霧化式化學氣相沉積氧化鋅磊晶薄膜 2014
3 霧化式化學氣相沉積氧化鋅磊晶薄膜 2013
4 化學氣相沉積鑽石之新技術研究 2013
5 霧化式化學氣相沉積氧化鋅磊晶薄膜 2012
6 化學氣相沉積鑽石之新技術研究 2012
7 基板工程應用於氧化鋅與鑽石異質磊晶成長之研究 2011
8 富銦之氮化鋁銦薄膜成長與性質
2010
9 基板工程應用於氧化鋅與鑽石異質磊晶成長之研究 2010
10 基板工程應用於氧化鋅與鑽石異質磊晶成長之研究 2009
11 單光子源之奈米鑽石製備及特性研究 2008
12 氧化鋅摻雜改質與奈米結構之製程與光電特性研究---子計畫一:氧化鋅光電半導體能隙調整及磊晶成長研究(III)
2007
13 單光子源之奈米鑽石製備及特性研究 2007
14 微波電漿化學氣相沉積光學鑽石晶片製造技術 2007
15 氧化鋅摻雜改質與奈米結構之製程與光電特性研究---氧化鋅光電半導體能隙調整及磊晶成長研究(II) 2006
16 單光子源之奈米鑽石製備及特性研究 2006
17 氧化鋅摻雜改質與奈米結構之製程與光電特性研究-氧化鋅光電半導體能隙調整及磊晶成長研究(I)
2005
18 基材影響鑽石成長之機制研究(III)
2005
19 基材影響鑽石成長之機制研究(II) 2004
20 光資訊關鍵性材料製程與性質研究---子計畫四:磊晶氧化鋅之製程及特性研究(II)
2004
21 基材影響鑽石成長之機制研究(I)
2003
22 光資訊關鍵性材料製程與性質研究---子計畫IV:磊晶氧化鋅之製程及特性研究(II)
2003
23 光資訊關鍵性材料製程與性質研究---子計畫IV:磊晶氧化鋅之製程及特性研究(I)
2002
24 探討影響異質磊晶鑽石成長之因素(III)
2002
25 探討影響異質磊晶鑽石成長之因素(II) 2001
26 銅導線及其障礙層之材質研究 2000
27 銅導線及其障礙層之材質研究(II)
2000
28 偏壓法於非導體基材成長磊晶鑽石之研究(II)
2000
29 探討影響異質磊晶鑽石成長之因素(I) 2000
30 偏壓法於非導體基材成長磊晶鑽石之研究 1999
31 超大型積體電路中連接導線之銅材及障礙層微結構及特性研究
1999
32 磊晶鑽石膜成核之研究
1998

Proceedings Paper

序號
No.
標題
Title
著作日期
Date
1 Photoluminescence Study of Interdot Carrier Transfer on Strain-relaxed InAs Quantum Dots 2011-01-01
2 The influence of inserted ZnO underlayer on the growth behavior of a-plane GaN on (001) LaAlO(3) 2010-04-01
3 Structural property of m-plane ZnO epitaxial film grown on LaAlO(3) (112) substrate 2010-04-01
4 Microstructure of a-plane ZnO grown on LaAlO(3) (001) 2010-03-31
5 Substrate engineering of LaAlO(3) for non-polar ZnO growth 2010-03-31
6 Growth of diamond nanoplatelets on nanocrystalline diamond substrates
2009-02-01
7 Growth and characterization of diamond films on TiN/Si(100) by microwave plasma chemical vapor deposition
2009-02-01
8 Non-polar a-plane GaN grown on LaAlO3 (001) substrate by pulsed laser deposition
2008-04-01
9 Investigation on microstructure in GaN epitaxial growth on the stripe-patterned r-plane sapphire substrates
2008-04-01
10 Growth of ZnMgO/ZnO films on r-plane sapphires by pulsed laser deposition
2008-04-01
11 Bias-enhanced nucleation of oriented diamonds on cone-like Si
2008-04-01
12 Growth of epitaxial ZnO thin film on yttria-stabilized zirconia single-crystal substrate
2007-01-01
13 Atomic layer deposition of epitaxial ZnO on GaN and YSZ
2007-01-01
14 GaN/AlGaN active regions for terahertz quantum cascade lasers grown by low-pressure metal organic vapor deposition
2007-01-01
15 Growth and characterization of chemical-vapor-deposited zinc oxide nanorods
2006-03-01
16 Chemical vapor deposition of uniform and high-quality diamond films by bias-enhanced nucleation method
2006-03-01
17 Novel slurry solution for dishing elimination in copper process beyond 0.1-mu m technology
2006-03-01
18 Effects of plasma treatment in the tungsten process for chemical vapor deposition titanium nitride barrier film beyond nanometer technology
2006-03-01
19 Investigation of overpotential and seed thickness on damascene copper electroplating
2006-02-24
20 The orientation effect of silicon grains on diamond deposition
2005-11-01
21 Microwave plasma chemical vapor deposition of cone-like structure of diamond/SiC/Si on Si (100)
2005-11-01
22 Highly oriented diamond growth on SixGe1-x (100) thin films
2004-11-01
23 Synthesis of diamond hexagonal nanoplatelets by microwave plasma chemical vapor deposition
2004-11-01
24 Diamond deposition on Au/amorphotis Si thin films
2004-04-01
25 Characterization of diamond nanoplatelets
2004-04-01
26 Evaluation of advanced chemical mechanical planarization techniques for copper damascene interconnect
2004-01-30
27 Microstructural evolution of Cu/Ta/GaAs multilayers with thermal annealing 2004-01-01
28 Chemical vapor deposition of zinc oxide thin films on Y2O3/Si substrates 2004-01-01
29 Chemical vapor deposition of epitaxial zinc oxide thin films on gallium nitride/sapphire substrates 2004-01-01
30 Diamond deposition on Si (111) and carbon face 6H-SiC (0001) substrates by positively biased pretreatment
2002-03-01
31 Growth of diamond films with bias during microwave plasma chemical vapor deposition
2002-03-01
32 Observations of segregation of Al in AlGaN alloys
2001-11-23
33 Diamond growth onCoSi(2)/Si by bias-enhanced microwave plasma chemical vapor deposition method
2001-11-01
34 Diamond nucleation on Cu by using MPCVD with a biasing pretreatment
2001-11-01
35 Novel strategies of FSG-CMP for within-wafer uniformity improvement and wafer edge yield enhancement beyond 0.18 micro technologies
2001-01-01
36 Four-dimensional dielectric property image obtained from electron spectroscopic imaging series
2001-01-01
37 Extension of HRTEM resolution by semi-blind deconvolution method and Gerchberg-Saxton algorithm: application to grain boundary and interface
2001-01-01
38 Deposition of heteroepitaxial diamond on 6H-SiC single crystal by bias-enhanced microwave plasma chemical vapor deposition
2000-04-01
39 Backside copper metallization of GaAs MESFET's using Ta and TaN as diffusion barrier 2000-01-01
40 The effect of heat treatment on Ni/Au ohmic contacts to p-type GaN
1999-11-16
41 Improvement of resolution by maximum entropy linear image restoration for NiSi2/Si interface
1999-01-01
42 HRTEM and EFTEM studies of the evolution of Cu/Ta/SiO2/Si interfaces in ULSI devices 1999-01-01
43 Microstructural investigation of oxidized Ni/Au ohmic contact to p-type GaN
1999-01-01
44 High resolution and energy filtering TEM study of interfacial structure and reaction in advanced materials processing
1998-04-10

Thesis

序號
No.
標題
Title
著作日期
Date
1 以化學浴法在圖案化基板上側向成長非極性氧化鋅 2014
2 氮化矽層抑制氮化鎵成長於(111)矽基板之回熔蝕刻現象研究 2014
3 霧化化學氣相沉積氧化鋅薄膜於藍寶石單晶 2014
4 以水熱法在異質基板上成長氧化鋅之研究 2013
5 鋁酸鑭上之半極性氧化鋅磊晶薄膜-成長與結構分析 2013
6 成長於氧化鎂基板上之氮氧化鈦與碳氧化鈦磊晶薄膜結構與特性研究
2013
7 鑲埋矽基量子點之鑽石(111)同質磊晶成長 2013
8 矽磊晶製程表面微粒污染減量之研究 2013
9 脈衝雷射沉積非極性A面氧化鋅於R面藍寶石基板之磊晶研究 - 表面形貌、應變,以及結晶性之演變
2012
10 領導者正向心情及服務績效的跨層次分析:透過團體氛圍及正向心理資本的中介 2012
11 有機金屬分子束磊晶成長極性/半極性氮化銦磊晶薄膜之研究 2012
12 於氮化鋁/矽基板上沉積鑽石之研究
2011
13 熱均壓及碳含量對微細鑄造CM-681LC超合金顯微組織及機械性能之研究
2010
14 於鋁酸鑭單晶基板成長非極性氧化鋅薄膜之研究
2010
15 風險評估技術應用於變更管理改善之研究—以某公司加氣站為例 2010
16 成長於鋁酸鑭基板上之非極性氧化鋅薄膜顯微結構分析
2010
17 在金剛烷披覆之矽基材上探討 鑽石的成核、成長與結構特性之研究
2010
18 動態隨機存取記憶體(DRAM)電容清洗技術之研究
2010
19 奈米金粒鑲埋於鑽石(111)面之同質磊晶成長
2010
20 影響網路團購行為因素之研究 2010
21 臭氧前處理及雷射退火對多晶矽特性之研究
2009
22 在具有氮化鈦緩衝層之(001)矽晶片上成長鑽石之研究
2009
23 穿透式電子顯微鏡應用於超晶格結構中內層砷化銦/砷化鎵量子點之研究
2009
24 規則性奈米平板鑽石沉積在高方向性(111)鑽石薄膜基板之研究
2008
25 脈衝雷射沉積法成長非極性摻雜鋁之氧化鋅磊晶薄膜於R面(1-102)藍寶石基板
2008
26 陽極氧化鋁模版法製作奈米結構材料及其電子場發射特性研究
2008
27 水溶液法成長氧化鋅薄膜及其薄膜電晶體製作
2007
28 偏壓法生長方向性鑽石薄膜之研究
2007
29 使用緩衝層成長磊晶氧化鋅於單晶基板上之研究
2007
30 GaAsSb緩衝層對於InAs/GaAs系統中量子點結構與性質之效應
2006
31 偏壓輔助化學氣相沉積均勻鑽石-成核和成長之研究
2006
32 金屬有機化學氣相沉積磊晶氧化鋅薄膜於氧化物單晶基板之研究
2006
33 射頻濺鍍氧化鋅薄膜於鍺基板之研究
2006
34 使用I-line stepper 開發 Low cost 及可大量生產之0.25 um gate pHEMT
2006
35 奈米平板鑽石沉積在(111)面向鑽石薄膜之研究
2006
36 The effect of cubic SiC on formation of oriented diamonds on Si(100) substrates
2006
37 二維奈米平板鑽石之合成及其微結構分析之研究
2005
38 介孔洞二氧化矽超低介電薄膜在積體電路技術之應用
2005
39 銅製程在奈米半導體積體電路製程整合研究 2005
40 奈米平板鑽石成長及基材晶向對鑽石異質成核影響之研究
2004
41 化學氣相沉積氧化鋅磊晶薄膜於YSZ基板之研究
2004
42 交流偏壓對鑽石成核影響之研究
2004
43 以陽極氧化鋁模板在矽基材上輔助成長奈米結構材料
2004
44 一維氧化鋅奈米結構成長過程之研究
2003
45 微波電漿化學氣相沈積法合成鑽石於多晶矽基材之研究
2003
46 數位無線通訊系統應用之低電壓高功率砷化鎵場效電晶體研究 2002
47 利用微波電漿化學氣相沉積法於金矽液態基材上合成鑽石之研究 2001
48 釕與二氧化釕薄膜應用於銅金屬化之擴散阻障層特性研究 2000
49 評估錸膜與含氧錸膜應用於銅金屬化之擴散阻障層特性研究 2000
50 鎢化鈦與鈦鎢氮化物薄膜應用於銅金屬化之擴散阻障層特性研究 2000
51 銅導線之鈦及氮化鉭複合層擴散障礙特性研究 1999
52 於微波電漿氣相沈積系統中使用偏壓法於銅基材上成長鑽石之研究 1999
53 鉭及氮化鉭複合層應用於積體電路銅金屬化之擴散障礙特性研究 1998
54 應用於低電壓無線通訊之假晶砷化鋁鎵/砷化銦鎵功率高電子遷移率電晶體之研究 1998