Title: Investigation of anomalous inversion C-V characteristics for long-channel MOSFETs with leaky dielectrics: Mechanisms and reconstruction
Authors: Lee, Wei
Su, Pin
Su, Ke-Wei
Chiang, Chung-Shi
Liu, Sally
電子工程學系及電子研究所
Department of Electronics Engineering and Institute of Electronics
Keywords: capacitance-voltage (C-V);intrinsic input resistance;metal-oxide-emiconductor (MOS) capacitance;MOSFET;ultrathin gate oxide
Issue Date: 1-Feb-2008
Abstract: This paper investigates anomalous inversion capacitance-voltage (C-V) attenuation for MOSFETs with leaky dielectrics. We propose to reconstruct the inversion C-V characteristic based on long-channel MOSFETs using the concept of intrinsic input resistance (R-ii). The concept of R-ii has been validated by segmented BSIM4/SPICE simulation. Our reconstructed C-V characteristics show poly-depletion effects, which are not visible in the two-frequency three-element method and agree well with the North Carolina State University-CVC simulation results. The intrinsic input resistance dominates the overall gate-current-induced debiasing effect (similar to 95% for L = 20 mu m) and can be extracted directly from the I-V characteristics. Due to its simplicity, our proposed R-ii approach may provide an option for regular process monitoring purposes.
URI: http://dx.doi.org/10.1109/TSM.2007.914374
http://hdl.handle.net/11536/9747
ISSN: 0894-6507
DOI: 10.1109/TSM.2007.914374
Journal: IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING
Volume: 21
Issue: 1
Begin Page: 104
End Page: 109
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