標題: Comparison of cleanroom samplers for inorganic airborne molecular contaminants
作者: Lin, I-Kai
Bai, Hsunling
Liu, Cheng-Chang
Wu, Bi-Jun
環境工程研究所
Institute of Environmental Engineering
關鍵字: airborne molecular contamination (AMC);cleanroom;micro-contamination;semiconductor device;diffusion denuder sampler (DDS);impinger air sampler
公開日期: 1-Mar-2008
摘要: The performances of inorganic airborne molecular contaminants (AMCs) via silica gel tubes, impingers, and diffusion denuder sampler (DDS) were compared in a cleanroom. The results showed silica gel tubes were not applicable for cleanroom sampling due to high blanks. While with optimal sampling conditions both impingers and DDS have much better performances, of which DDS has the lowest detection limits of the method for HF, HCl, HNO2, HNO3, SO2, and NH3 gases to be 0.15, 0.11, 0.13, 0.03, 0.07, and 0.42 mu g/m(3), respectively. Results indicated no significant difference for the HF and SO42- concentrations made by the DDS and impingers.
URI: http://dx.doi.org/10.1080/01496390701870580
http://hdl.handle.net/11536/9643
ISSN: 0149-6395
DOI: 10.1080/01496390701870580
期刊: SEPARATION SCIENCE AND TECHNOLOGY
Volume: 43
Issue: 4
起始頁: 842
結束頁: 861
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