Title: A novel technique for measuring pico-scale flow rate of a liquid solution using a microchannel
Authors: Chang, Kow-Ming
Chao, Kuo-Yi
Lin, Kun-Feng
Department of Electronics Engineering and Institute of Electronics
Keywords: microchannel;pico-liter;sacrificial layer;measuring;HDP-RIE
Issue Date: 28-Mar-2008
Abstract: As micrototal analysis system (mu-TAS) becoming more extensively used, techniques for fabricating microchannels, microactuators, and measuring systems are becoming increasingly important. This study describes a novel method for fabricating a closed microchannel that can be used to measure the pico-scale flow rate of a liquid solution with an accuracy of better than 1 pL/s. The flow rate of 9 pL/s is calculated from the measurements. Without any high temperature or high-voltage processing, the microchannel can be integrated in the complementary metal-oxide-semiconductor (CMOS) microfluidic system and the fabricating process involves only some standard CMOS processes and common materials. The batch fabrication of a single integrated circuit (IC) chip is essential to reaching the goal of a system in one chip. (C) 2007 Elsevier B.V. All rights reserved.
URI: http://dx.doi.org/10.1016/j.snb.2007.10.047
ISSN: 0925-4005
DOI: 10.1016/j.snb.2007.10.047
Volume: 130
Issue: 2
Begin Page: 943
End Page: 946
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