標題: A novel technique for measuring pico-scale flow rate of a liquid solution using a microchannel
作者: Chang, Kow-Ming
Chao, Kuo-Yi
Lin, Kun-Feng
電子工程學系及電子研究所
Department of Electronics Engineering and Institute of Electronics
關鍵字: microchannel;pico-liter;sacrificial layer;measuring;HDP-RIE
公開日期: 28-三月-2008
摘要: As micrototal analysis system (mu-TAS) becoming more extensively used, techniques for fabricating microchannels, microactuators, and measuring systems are becoming increasingly important. This study describes a novel method for fabricating a closed microchannel that can be used to measure the pico-scale flow rate of a liquid solution with an accuracy of better than 1 pL/s. The flow rate of 9 pL/s is calculated from the measurements. Without any high temperature or high-voltage processing, the microchannel can be integrated in the complementary metal-oxide-semiconductor (CMOS) microfluidic system and the fabricating process involves only some standard CMOS processes and common materials. The batch fabrication of a single integrated circuit (IC) chip is essential to reaching the goal of a system in one chip. (C) 2007 Elsevier B.V. All rights reserved.
URI: http://dx.doi.org/10.1016/j.snb.2007.10.047
http://hdl.handle.net/11536/9553
ISSN: 0925-4005
DOI: 10.1016/j.snb.2007.10.047
期刊: SENSORS AND ACTUATORS B-CHEMICAL
Volume: 130
Issue: 2
起始頁: 943
結束頁: 946
顯示於類別:期刊論文


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  1. 000255107700052.pdf