標題: 單晶CVD薄膜和熔化成長法製程中之不穩定熱流與使其穩定研究---子計畫一:水平單晶成長之不穩定熱流實驗與數值模擬研究(III)
Experimental and Numerical Study of Unstable Flow and Heat Transfer in Horizontal CVD Growth of Single Crystal (III)
作者: 林清發
LIN TSING-FA
交通大學機械工程系
關鍵字: 薄膜單晶;浮力;慣性力;渦流;對流;化學氣相沈積法;Thin film single crystal;Buoyancy;Inertia force;Vortex;Convection;Chemical vapor deposition (CVD)
公開日期: 1998
官方說明文件#: NSC87-2212-E009-029
URI: http://hdl.handle.net/11536/95033
https://www.grb.gov.tw/search/planDetail?id=353163&docId=63027
Appears in Collections:Research Plans


Files in This Item:

  1. 872212E009029.pdf