標題: Surface morphological and nanomechanical properties of PLD-derived ZnO thin films
作者: Jian, Sheng-Rui
Teng, I-Ju
Yang, Ping-Feng
Lai, Yi-Shao
Lu, Jian-Ming
Chang, Jee-Gong
Ju, Shin-Pon
材料科學與工程學系
Department of Materials Science and Engineering
關鍵字: ZnO;PLD;AFM;nanoindentation;nanoscratch;hardness
公開日期: 1-May-2008
摘要: This study reports the surface roughness and nanomechanical characteristics of ZnO thin films deposited on the various substrates, obtained by means of atomic force microscopy (AFM), nanoindentation and nanoscratch techniques. ZnO thin films are deposited on (a- and c-axis) sapphires and (0001) 6H-SiC substrates by using the pulsed-laser depositions (PLD) system. Continuous stiffness measurements (CSM) technique is used in the nanoindentation tests to determine the hardness and Young's modulus of ZnO thin films. The importance of the ratio (H/E-film) of elastic to plastic deformation during nanoindentation of ZnO thin films on their behaviors in contact-induced damage during fabrication of ZnO-based devices is considered. In addition, the friction coefficient of ZnO thin films is also presented here.
URI: http://dx.doi.org/10.1007/s11671-008-9134-4
http://hdl.handle.net/11536/9391
ISSN: 1931-7573
DOI: 10.1007/s11671-008-9134-4
期刊: NANOSCALE RESEARCH LETTERS
Volume: 3
Issue: 5
起始頁: 186
結束頁: 193
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