標題: Fabrication and characterization of excimer laser crystallized double-gate low-temperature poly-silicon thin film transistors
作者: Tsai, Chun-Chien
Wei, Kai-Fang
Lee, Yao-Jen
Lee, I-Che
Chen, Hsu-Hsin
Wang, Jyh-Liang
Chen, Hsai-Wei
Cheng, Huang-Chung
電子工程學系及電子研究所
Department of Electronics Engineering and Institute of Electronics
公開日期: 2007
摘要: In this letter, high-performance low-temperature poly-Silicon (LTPS) thin film transistors (TFTs) with double-gate (DG) structure and lateral silicon grains have been demonstrated by excimer laser crystallization (ELC). Therefore, the proposeed ELC DG TFTs exhibited better current-voltage characteristics as compared with the conventional solid-phase crystallized (SPC) poly-Si double-gate TFTs or conventional ELC top-gate (TG) TFTs.
URI: http://hdl.handle.net/11536/9279
ISBN: 978-957-28522-4-8
期刊: IDMC'07: PROCEEDINGS OF THE INTERNATIONAL DISPLAY MANUFACTURING CONFERENCE 2007
起始頁: 529
結束頁: 532
Appears in Collections:Conferences Paper