標題: Deassociate the initial temporal phase deviation provided by photoelastic modulator for stroboscopic illumination polarization modulated ellipsometry
作者: Tsai, Hsiu-Ming
Chen, Chih-Wei
Tsai, Tsung-Han
Chao, Yu-Faye
光電工程學系
Department of Photonics
公開日期: 1-Mar-2011
摘要: In addition to operating the imaging ellipsometric measurements by four-specific temporal phases in the photoelastic modulated ellipsometry, we added the fifth one to solve the initial phase of the photoelastic modulator. This methodology has been developed to conquer the slow imaging processing of charge-coupled device camera for the stroboscopic illumination in the polarization modulated imaging ellipsometry. Without any calibration in its initial phase, we can perform the ellipsometric measurement by the measurements of intensity at five-specific temporal phases. The intensities of a full cycle for a point on SiO(2)/Si thin film were measured and analyzed for verifying this algorithm. The five stroboscopic illuminations were performed to measure the two-dimensional distribution of the same SiO(2)/Si thin film. (C) 2011 American Institute of Physics. [doi: 10.1063/1.3568745]
URI: http://dx.doi.org/10.1063/1.3568745
http://hdl.handle.net/11536/9173
ISSN: 0034-6748
DOI: 10.1063/1.3568745
期刊: REVIEW OF SCIENTIFIC INSTRUMENTS
Volume: 82
Issue: 3
結束頁: 
Appears in Collections:Articles


Files in This Item:

  1. 000289149600090.pdf