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DC FieldValueLanguage
dc.contributor.author潘扶民en_US
dc.contributor.authorPAN FU-MINGen_US
dc.date.accessioned2014-12-13T10:31:25Z-
dc.date.available2014-12-13T10:31:25Z-
dc.date.issued2004en_US
dc.identifier.govdocNSC93-2215-E009-028zh_TW
dc.identifier.urihttp://hdl.handle.net/11536/90913-
dc.identifier.urihttps://www.grb.gov.tw/search/planDetail?id=1026685&docId=195178en_US
dc.description.sponsorship行政院國家科學委員會zh_TW
dc.language.isozh_TWen_US
dc.title以自組裝奈米孔洞SiO2作為次70 nm IC技術之超低介電薄膜之應用研究(II)zh_TW
dc.titleSelf-Assembly Nanoporous Silica as an Ultra-Low K Dielectric for Sub-70 nm IC Technologies(II)en_US
dc.typePlanen_US
dc.contributor.department交通大學材料科學與工程系zh_TW
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