Title: On-panel electrostatic discharge (ESD) protection design with thin-film transistor in LTPS process
Authors: Ker, Ming-Dou
Chuang, Jie-Yao
Deng, Chih-Kang
Kuo, Chung-Hong
Li, Chun-Huai
Lai, Ming-Sheng
Wang, Chih-Wei
Liu, Chun-Ting
College of Electrical and Computer Engineering
Keywords: thin-film transistors (TFTs);low-temperature polycrystalline silicon (LTPS);electrostatic discharge (ESD);transmission line pulsing (TLP) system
Issue Date: 2007
Abstract: The electrostatic discharge (ESD) robustness of diode-connected n-type thin-film transistors (N-TFTs) and diode-connected p-type thin-film transistors (P-TFTs) with different layout structures in a given low-temperature polycrystalline silicon (LTPS) process is investigated. By using the wafer-level transmission line pulsing (TLP) system, the high-current transient characteristics and the secondary breakdown current (It2) levels of the diode-connected TFTs under different device parameters and layout structures are directly measured on the glass substrate. Finally, one set of design rules for on-panel ESD protection design is suggested.
URI: http://hdl.handle.net/11536/8878
ISBN: 978-7-5617-5228-9
Journal: AD'07: Proceedings of Asia Display 2007, Vols 1 and 2
Begin Page: 551
End Page: 556
Appears in Collections:Conferences Paper