|標題:||Development of novel cascade structure for improving stroke of electrostatic comb-drive actuator|
|作者:||Chiou, J. C.|
Kuo, C. F.
Lin, Y. J.
Chang, C. W.
Hou, K. C.
National Chiao Tung University
|摘要:||In this study, a novel cascade structure for improving the stroke of electrostatic comb-drive actuator is proposed. With the cascade configuration, the stroke can be improving efficiency. The proposed actuators were fabricated through CMOS processes and post-CMOS micromachining steps. Experimental results indicated that the stroke of the lateral and vertical cascade electrostatic comb-drive actuators can be improved 180% and 188% respectively without adding extra driving voltage. These results demonstrated that the proposed cascade configurations have the capability to improve the actuation stroke of electrostatic actuators.|
|期刊:||MEMS 2008: 21ST IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST|