標題: Measuring relative performance of wafer fabrication operations: a case study
作者: Chen, Wen-Chih
Chien, Chen-Fu
工業工程與管理學系
Department of Industrial Engineering and Management
關鍵字: Performance evaluation;Fab operations;Semiconductor manufacturing;DEA
公開日期: 1-六月-2011
摘要: This paper was motivated by a request to review relative operations performance for various fabrication facilities within a leading Taiwanese semiconductor manufacturer. Performance evaluation is important but often controversial. To dispel the controversy, we propose a two-stage fabrication process model to systematically analyze metrics currently adopted, and show that the commonly used wafer-based indices are biased for operations performance. Instead, they should be decomposed into productivity, representing true operations performance, and manufacturability. We suggest the use of data envelopment analysis because of its confirmed linkages to other widely used productivity measures and its overall performance via relative comparisons. The case study illustrates how the two-stage model evaluates and analyzes real-world operations, and the empirical results show the drawbacks of conventional methods.
URI: http://dx.doi.org/10.1007/s10845-009-0302-x
http://hdl.handle.net/11536/8810
ISSN: 0956-5515
DOI: 10.1007/s10845-009-0302-x
期刊: JOURNAL OF INTELLIGENT MANUFACTURING
Volume: 22
Issue: 3
起始頁: 447
結束頁: 457
顯示於類別:期刊論文


文件中的檔案:

  1. 000290574400011.pdf