標題: Characterization and modeling of metal-film microbolometer
作者: Shie, JS
Chen, YM
Mang, OY
Chou, BCS
交大名義發表
光電工程學系
National Chiao Tung University
Department of Photonics
公開日期: 1-十二月-1996
摘要: The characteristic thermal parameters of a platinum-film microbolometer are extracted from the data of two measuring methods, A simple and accurate equivalent circuit model, along with its thermal behavior, is proposed for the device. Applying the model to simulate some device circuits results in good agreement with the experimental data, Furthermore, an effective method of ambient temperature compensation, proposed previously by our laboratory, is demonstrated both experimentally and by simulation using the same model. The established electro-thermal model therefore serves as an useful tool for SPICE simulations in the design of microbolometers.
URI: http://dx.doi.org/10.1109/84.546409
http://hdl.handle.net/11536/881
ISSN: 1057-7157
DOI: 10.1109/84.546409
期刊: JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume: 5
Issue: 4
起始頁: 298
結束頁: 306
顯示於類別:期刊論文


文件中的檔案:

  1. A1996VY41300009.pdf