標題: Diamond-shaped microplasma device using thick photoresist as a barrier rib in Ne-Ar gas mixtures
作者: Kim, Sung-O
光電工程學系
顯示科技研究所
Department of Photonics
Institute of Display
關鍵字: glow discharge;microdischarge
公開日期: 1-Aug-2008
摘要: The discharge characteristics of the diamond-shaped microplasma devices with pure neon, neon-1% argon, and neon-5% argon gas mixtures are investigated. The 5 x 5 arrays of diamond-shaped microplasma devices operating at pressures from 300 to 800 torr have been characterized. The diamond-shaped microplasma devices, offer advantages such as having a high yield process, low ignition voltage, stable glow discharge, and low cost. The electrical properties of neon discharges have been examined with different argon fractions. The diamond-shaped microplasma device operates at voltages as low as 190 V, at 800 torr.
URI: http://dx.doi.org/10.1109/TPS.2008.922936
http://hdl.handle.net/11536/8544
ISSN: 0093-3813
DOI: 10.1109/TPS.2008.922936
期刊: IEEE TRANSACTIONS ON PLASMA SCIENCE
Volume: 36
Issue: 4
起始頁: 1242
結束頁: 1243
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