Title: Microplasma device utilizing SU-8 photoresist as a barrier rib
Authors: Kim, Sung-O
光電工程學系
顯示科技研究所
Department of Photonics
Institute of Display
Keywords: microdischarge
Issue Date: 1-Aug-2008
Abstract: A Microplasma device utilizing SU-8 photoresist as a barrier rib has been fabricated and characterized operating in the abnormal mode for neon pressures from 300 to 800 torr and having a hexagonal structure, 5 x 5 arrays of microplasma. The microplasma device, which has a simple fabrication process, offers advantages such as low firing voltage, low cost, and stable glow discharge. The electrical properties have been examined by bipolar voltage waveforms with different frequencies. The geometric patterns of the barrier rib can be simply changed by lithographic techniques.
URI: http://dx.doi.org/10.1109/TPS.2008.922939
http://hdl.handle.net/11536/8509
ISSN: 0093-3813
DOI: 10.1109/TPS.2008.922939
Journal: IEEE TRANSACTIONS ON PLASMA SCIENCE
Volume: 36
Issue: 4
Begin Page: 1244
End Page: 1245
Appears in Collections:Articles


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