Title: Syntheses and characterization of organoimido complexes of tantalum; potential single-source precursors to tantalum nitride
Authors: Chiu, HT
Chuang, SH
Tsai, CE
Lee, GH
Peng, SM
應用化學系
Department of Applied Chemistry
Keywords: organoimide complexes;tantalum complexes;CVD precursors
Issue Date: 1998
Abstract: New single-source precursor to tantalum nitride thin films, ((BuN)-N-t)Ta(NEt2)(3), and related complexes, (RN)Ta(NEt2)(3) (R = Pr-i and Pr-n), were prepared by reacting corresponding (RN)TaCl(3)py(2) complexes (R = Bu-t, Pr-i and Pr-n) with LiNEt2 in hydrocarbon solvents. The structure of ((BuN)-N-t)TaCl(3)py(2) was determined by X-ray crystallography. (C) 1998 Elsevier-Science Ltd. All rights reserved.
URI: http://hdl.handle.net/11536/85
ISSN: 0277-5387
Journal: POLYHEDRON
Volume: 17
Issue: 13-14
Begin Page: 2187
End Page: 2190
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