標題: A-axis YBCO thin films deposited by DC magnetron sputtering
作者: Tsai, WC
Tseng, TY
電子工程學系及電子研究所
Department of Electronics Engineering and Institute of Electronics
關鍵字: a-axis;YBCO;superconductor;island growth;thin film;surface morphology;atomic force microscopy
公開日期: 1-一月-1997
摘要: A-axis YBCO thin films deposited on SrTiO3 and MgO substrates were prepared using the template-layer method by off-axis magnetron sputtering. The thin films deposited on MgO with template layers displayed better electrical properties and crystallinity than those deposited on the substrates without template layers, whereas the crystallinity of films deposited on SrTiO3 by the template-layer method showed no improvement. The surface morphology of the films, observed by high-resolution scanning electron microscopy, indicates that the homoepitaxial growth of the a-axis films on template layers on MgO and SrTiO3 results in rougher surfaces than in the case of heteroepitaxial growth of template layers. The possible mechanisms contributing to these differences in surface roughness were carefully investigated. Atomic force microscopy was also used to characterize the initial growth of a-axis films on MgO and SrTiO3. According to the results, the initial growth of a-axis films on MgO and SrTiO3 resembles that of island growth.
URI: http://dx.doi.org/10.1143/JJAP.36.76
http://hdl.handle.net/11536/833
ISSN: 0021-4922
DOI: 10.1143/JJAP.36.76
期刊: JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS
Volume: 36
Issue: 1A
起始頁: 76
結束頁: 83
顯示於類別:期刊論文


文件中的檔案:

  1. A1997WG05600013.pdf