Title: The sensitivity of the common focus error of a reference lens on the measurement accuracy in a Fizeau interferometer
Authors: Yeh, MS
Shiue, SG
Lu, MH
光電工程學系
Department of Photonics
Issue Date: 1-Jan-1997
Abstract: A technique used to examine the performance of reference lens of interferometer is described. The defects in the reference lens that are primarily due to the manufacturing errors or the assembly errors or both will result in the common focus error of reference lens at the centre of curvature of reference surface, which affects the measurement accuracy. The optical path difference between the reference wave front and the test wave front at the exit pupil is applied to analyse the influence of common focus error of reference lens on the measurement errors. A comparison of the experimental result with the numerical analysis is made.
URI: http://hdl.handle.net/11536/832
ISSN: 0950-0340
Journal: JOURNAL OF MODERN OPTICS
Volume: 44
Issue: 1
Begin Page: 203
End Page: 208
Appears in Collections:Articles


Files in This Item:

  1. A1997WC46900015.pdf