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dc.contributor.authorChiu, Yien_US
dc.contributor.authorHuang, Chien-Hsunen_US
dc.contributor.authorHsu, Ying-Chienen_US
dc.date.accessioned2014-12-08T15:10:30Z-
dc.date.available2014-12-08T15:10:30Z-
dc.date.issued2007en_US
dc.identifier.isbn978-0-8194-6762-1en_US
dc.identifier.issn0277-786Xen_US
dc.identifier.urihttp://hdl.handle.net/11536/8013-
dc.identifier.urihttp://dx.doi.org/10.1117/12.738639en_US
dc.description.abstractThe focusing objective lens is a key component in the optical pick-up head. In this paper, focused ion beam milling is used to fabricate a NA 0.65 microlens in the silicon nitride film suspended on a silicon substrate. The measured NA is 0.64 and the focused spot size is 0.64 mu m.en_US
dc.language.isoen_USen_US
dc.subjectnumerical apertureen_US
dc.subjectmicrolensen_US
dc.subjectfocused ion beamen_US
dc.subjectsilicon nitrideen_US
dc.titleHigh numerical-aperture microlens fabricated by focused ion beam milling - art. no. 66200Len_US
dc.typeProceedings Paperen_US
dc.identifier.doi10.1117/12.738639en_US
dc.identifier.journalOptical Data Storage 2007en_US
dc.citation.volume6620en_US
dc.citation.spageL6200en_US
dc.citation.epageL6200en_US
dc.contributor.department電控工程研究所zh_TW
dc.contributor.departmentInstitute of Electrical and Control Engineeringen_US
dc.identifier.wosnumberWOS:000250199900012-
Appears in Collections:Conferences Paper


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