標題: High numerical-aperture microlens fabricated by focused ion beam milling - art. no. 66200L
作者: Chiu, Yi
Huang, Chien-Hsun
Hsu, Ying-Chien
電控工程研究所
Institute of Electrical and Control Engineering
關鍵字: numerical aperture;microlens;focused ion beam;silicon nitride
公開日期: 2007
摘要: The focusing objective lens is a key component in the optical pick-up head. In this paper, focused ion beam milling is used to fabricate a NA 0.65 microlens in the silicon nitride film suspended on a silicon substrate. The measured NA is 0.64 and the focused spot size is 0.64 mu m.
URI: http://hdl.handle.net/11536/8013
http://dx.doi.org/10.1117/12.738639
ISBN: 978-0-8194-6762-1
ISSN: 0277-786X
DOI: 10.1117/12.738639
期刊: Optical Data Storage 2007
Volume: 6620
起始頁: L6200
結束頁: L6200
Appears in Collections:Conferences Paper


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