|標題:||Micro actuated grating for multi-beam optical pickups - art. no. 66200I|
Shieh, Han-Ping D.
Department of Photonics
|關鍵字:||binary grating;actuator;micro-machining;optical pickup|
|摘要:||A stress-induced curved micro actuator with a grating attached at the end is demonstrated for recordable optical storage applications. The actuator and the grating were fabricated using a two-layer poly-silicon and one-layer silicon nitride micro-machining process. Three diffracted beams with equal intensity from the grating were generated when a voltage is applied to the actuator to switch its position. The single-beam and multi-beam configurations can be used for writing and reading data in the disc, respectively.|
|期刊:||Optical Data Storage 2007|
|Appears in Collections:||Conferences Paper|
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