標題: Five-element circuit model using linear-regression method to correct the admittance measurement of metal-oxide-semiconductor capacitor
作者: Cheng, Chao-Ching
Chien, Chao-Hsin
Luo, Guang-Li
Liu, Jun-Cheng
Chen, Yi-Cheng
Chang, Yao-Feng
Wang, Shin-Yuan
Kei, Chi-Chung
Hsiao, Chien-Nan
Chang, Chun-Yen
電子工程學系及電子研究所
Department of Electronics Engineering and Institute of Electronics
公開日期: 1-一月-2009
摘要: The authors present a linear-regression method based on a five-element circuit model to correct measured capacitance-voltage and conductance-voltage curves. This model explains the effects of series resistance and parasitic capacitance/inductance on the frequency dispersion of measured capacitance and the magnification of measured conductance. These extracted parasitic components show significant dependencies on the geometry of capacitor structure, thereby causing different frequency-dependent capacitance characteristics in measurements. (C) 2009 American Vacuum Society. [DOI: 10.1116/1.3058724]
URI: http://dx.doi.org/10.1116/1.3058724
http://hdl.handle.net/11536/7972
ISSN: 1071-1023
DOI: 10.1116/1.3058724
期刊: JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
Volume: 27
Issue: 1
起始頁: 130
結束頁: 133
顯示於類別:期刊論文


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  1. 000265839000024.pdf