Phase-measuring profilometry of 3D objects
The application of surface profile measurement is very extensive, such as product testing, reverse engineering, and so on, while how to make the measurement fast and accurate has been crucial. In this paper, we deduce the surface profile of a 3D diffuse object by measurement of the phase distribution across the image of a projected grating deformed by the surface. As a detailed evaluation, we first simulated the experimental structure by using MATLAB software, and explored possible error produced by the corresponding approach. Finally, we have built up the system, tested over different object forms, and compared the results with simulation. An effective phase-measuring profilometry of 3D objects has been realized through this thesis study.
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