Title: Electrical properties of O-2 and N-2 annealed (Ba,Sr)TiO3 thin films
Authors: Tsai, MS
Sun, SC
Tseng, TY
Department of Electronics Engineering and Institute of Electronics
Keywords: BST;annealing;oxygen vacancy;leakage current
Issue Date: 1-Jan-1998
Abstract: The dielectric constant and the leakage current of (Ba,Sr)TiO3 (BST) thin films deposited on Pt bottom electrodes before and after annealing in O-2 and N-2 ambients were investigated. The crystallinity was improved after postdeposition annealing. The refractive index, dielectric constant, and leakage current of the films were strongly dependent on the annealing conditions. The O-2-annealed BST films have higher dielectric constant and lower leakage current than those annealed in N-2 ambient.
URI: http://hdl.handle.net/11536/78
ISSN: 1058-4587
Volume: 21
Issue: 1-4
Begin Page: 173
End Page: 183
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