標題: 以溶膠-凝膠法製備鋯鈦酸鉛薄膜作為生物感測器之研究
Fabrication of PZT-based biosensor with sol-gel process
作者: 陳佳慧
Chiahui Chen
黃國華
Dr.Guewha Steven Huang
材料科學與工程學系奈米科技碩博士班
關鍵字: 生物感測器;溶膠凝膠法;壓電;鋯鈦酸鉛;Biosensor;sol-gel;piezoelectric;lead-zirconate-titanate
公開日期: 2004
摘要: 鋯鈦酸鉛(PbZrxTi1-xO3,PZT)陶瓷材料,因其具有良好之壓電特性,近年來已被廣泛應用在微機電元件的設計上。本論文利用PZT良好的壓電特性來當作感測器,以Sol-Gel法來成長壓電薄膜,製作出約0.6μm的壓電薄膜。 本實驗將鋯鈦酸鉛壓電薄膜應在生物檢測上,藉由36.80Hz的共振頻率下降,可偵測到10-11g的小牛血清蛋白重量。我們相信壓電陶瓷感測器在生物檢測上相當有潛力,未來若可針對系統進行最佳化調整與最適化,必能成為臨床檢測時的一大利器。
In recent years, the superior piezoelectric performance of lead-zirconate-titanate (PZT,PbZrxTi1-xO3) ceramic materials were applied for microelectro-mechanical-systems(MEMS)intensively. We deposited 0.6μm PZT piezoelectric thin film on silicon wafer, and applied piezoelectric property of PZT for sensing biological material. Sol-gel method was used to fabricate PZT piezoelectric thin film in current study. A PZT-based ceramic thin film resonator was constructed into a biosensing device. The resonator was capable of detecting 10-11g with resonance frequency shift of 36.80Hz. We have demonstrated that ceramic resonator is a potential biosensing device for genomic application.
URI: http://140.113.39.130/cdrfb3/record/nctu/#GT009252504
http://hdl.handle.net/11536/77503
Appears in Collections:Thesis


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  1. 250401.pdf
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  3. 250403.pdf
  4. 250404.pdf
  5. 250405.pdf
  6. 250406.pdf
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  8. 250408.pdf
  9. 250409.pdf