Title: Selective Device Structure Scaling and Parasitics Engineering: A Way to Extend the Technology Roadmap
Authors: Wei, Lan
Deng, Jie
Chang, Li-Wen
Kim, Keunwoo
Chuang, Ching-Te
Wong, H. -S. Philip
Department of Electronics Engineering and Institute of Electronics
Keywords: CMOS;contacted gate pitch;device geometry;device scaling;footprint;parasitic
Issue Date: 1-Feb-2009
Abstract: We propose a path for extending the technology roadmap when currently considered technology boosters (e.g., strain, high-kappa/metal gate) reach their limits and physical gate length can no longer be effectively scaled down. By judiciously engineering the device parasitic resistance and parasitic capacitance, and considering the impact of the interconnect wiring capacitance, we propose scenarios of selective device structure scaling that will enable technology scaling and contacted gate pitch scaling for several generations beyond the currently perceived limits.
URI: http://dx.doi.org/10.1109/TED.2008.2010573
ISSN: 0018-9383
DOI: 10.1109/TED.2008.2010573
Volume: 56
Issue: 2
Begin Page: 312
End Page: 320
Appears in Collections:Articles

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