Clean room rnvionment gas detector rationality mode of distribution and discuss
In the process of manufacturing, the alteration of manufacturing process might lead to changes of airflow in cleanrooms. Therefore, it is crucial to re-estimate the rationality of the positioning of cleanroom hazardous production material gas detectors. From 3.5 inch to 7.5 inches thin film transistor liquid crystal display (TFT LCD), the researchers have been seeking for more new applications and new product developments. The larger the size of the FTF LCD, the more the possible application could be applied on. However, with the growth of the numbers of applications, the types of chemicals being used in the cleanroom might increase. To provide a sound instruction in handling emergency responses, such as hazardous gas leakage, the impacts of the layout of newly introduced machine on cleanroom airflow are investigated to improve the accuracy and efficiency of the information shown by gas detectors, and to further enhanced the decision being made by operators. In the case of TFT-LCD factory, the airflow and equipment in the cleanroom were investigated; distribution of manufacturing equipment, gas valve manifold boxes and gas detectors were analyzed; physical properties of hazardous gases and information of supplying equipment were integrated and introduced as parameters into the gas diffusion simulation program for further analysis. The results of the simulation then were analyzed in comparison with the reality. Based on that, an enhanced solution in regards of engineering integrating and planning, gas detector distribution and installation was proposed. This research provides a suggestion and reference on optimization of gas detector distribution and installation.