標題: A low-temperature method for improving the performance of sputter-deposited ZnO thin-film transistors with supercritical fluid
作者: Chen, Min-Chen
Chang, Ting-Chang
Huang, Sheng-Yao
Chang, Kuan-Chang
Li, Hung-Wei
Chen, Shih-Ching
Lu, Jin
Shi, Yi
光電工程學系
顯示科技研究所
Department of Photonics
Institute of Display
關鍵字: dangling bonds;grain boundaries;II-VI semiconductors;passivation;semiconductor thin films;sputter deposition;thin film transistors;wide band gap semiconductors;X-ray photoelectron spectra;zinc compounds
公開日期: 20-Apr-2009
摘要: A low-temperature method, supercritical CO(2) (SCCO(2)) fluid technology, is employed to improve the device properties of ZnO TFT at 150 degrees C. In this work, the undoped ZnO films were deposited by sputter at room temperature and treated by SCCO(2) fluid which is mixed with 5 ml pure H(2)O. After SCCO(2) treatment, the on/off current ratios and threshold voltage of the device were improved significantly. From x-ray photoelectron spectroscopy analyses, the enhancements were attributed to the stronger Zn-O bonds, the hydrogen-related donors, and the reduction in dangling bonds at the grain boundary by OH passivation.
URI: http://dx.doi.org/10.1063/1.3124658
http://hdl.handle.net/11536/7355
ISSN: 0003-6951
DOI: 10.1063/1.3124658
期刊: APPLIED PHYSICS LETTERS
Volume: 94
Issue: 16
結束頁: 
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