|標題:||The Inductance Enhancement Study of Spiral Inductor Using Ni-AAO Nanocomposite Core|
|作者:||Hsu, M. C.|
Chao, T. Y.
Cheng, Y. T.
Liu, C. M.
Department of Materials Science and Engineering
Department of Electronics Engineering and Institute of Electronics
|關鍵字:||Anodic alumina oxide (AAO);inductance;magnetic resonance;Ni-anodic alumina oxide (Ni-AAO) nanocomposite core;Ni nanorods;quality (Q) factor;spiral inductor|
|摘要:||The letter presents the fabrication and characterization of on-chip spiral inductors with Ni-anodic alumina oxide (Ni-AAO) nanocomposite core. Ni nanorods with 70 nm diameter are deposited and isolated in an AAO matrix to form a layer of nanocomposite on silicon substrate. About 3% inductance enhancement to the inductor with the nanocomposite core has been observed and the enhancement can be kept up more than 6 GHz. Because the proposed inductance enhancement scheme using ferromagnetic-AAO-based nanocomposite as inductor core employs a CMOS-compatible fabrication process with the characteristics that can be further improved, it is our belief that the scheme has a great potential application for future radio frequency integrated circuitry (RFIC) manufacture.|
|期刊:||IEEE TRANSACTIONS ON NANOTECHNOLOGY|
|Appears in Collections:||Articles|
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