標題: The Inductance Enhancement Study of Spiral Inductor Using Ni-AAO Nanocomposite Core
作者: Hsu, M. C.
Chao, T. Y.
Cheng, Y. T.
Liu, C. M.
Chen, C.
材料科學與工程學系
電子工程學系及電子研究所
Department of Materials Science and Engineering
Department of Electronics Engineering and Institute of Electronics
關鍵字: Anodic alumina oxide (AAO);inductance;magnetic resonance;Ni-anodic alumina oxide (Ni-AAO) nanocomposite core;Ni nanorods;quality (Q) factor;spiral inductor
公開日期: 1-May-2009
摘要: The letter presents the fabrication and characterization of on-chip spiral inductors with Ni-anodic alumina oxide (Ni-AAO) nanocomposite core. Ni nanorods with 70 nm diameter are deposited and isolated in an AAO matrix to form a layer of nanocomposite on silicon substrate. About 3% inductance enhancement to the inductor with the nanocomposite core has been observed and the enhancement can be kept up more than 6 GHz. Because the proposed inductance enhancement scheme using ferromagnetic-AAO-based nanocomposite as inductor core employs a CMOS-compatible fabrication process with the characteristics that can be further improved, it is our belief that the scheme has a great potential application for future radio frequency integrated circuitry (RFIC) manufacture.
URI: http://dx.doi.org/10.1109/TNANO.2009.2015758
http://hdl.handle.net/11536/7255
ISSN: 1536-125X
DOI: 10.1109/TNANO.2009.2015758
期刊: IEEE TRANSACTIONS ON NANOTECHNOLOGY
Volume: 8
Issue: 3
起始頁: 281
結束頁: 285
Appears in Collections:Articles


Files in This Item:

  1. 000266162900002.pdf