Title: High oriented ZnO films by sol-gel and chemical bath deposition combination method
Authors: Cheng, Hua-Chi
Chen, Chia-Fu
Tsay, Chien-Yie
Leu, Jih-Perng
Department of Materials Science and Engineering
Keywords: ZnO;Thin films;Crystal growth;Crystal structure
Issue Date: 5-May-2009
Abstract: Poly-crystalline ZnO films with high oriented columnar grains were deposited on ZnO-coated seed layers by chemical bath deposition (CBD) in an aqueous-solution bath containing zinc nitrate [Zn(NO(3))(2)center dot 6H(2)O], and dimethylamineborane (DMAB) at 60 degrees C without pre-activation especially. Sol-gel ZnO films on glass substrates were used as the seed layers which the mean size of the crystals in seed layer increased from several to approximately 80nm at temperature from 150 degrees C to 550 degrees C. The deposited ZnO films on the ZnO-coated seed surfaces are preferentially on the (0 0 2) plane and exhibit increased from several 10 nm to 150 nm with increasing seed layer grain size. (C) 2008 Elsevier B.V. All rights reserved.
URI: http://dx.doi.org/10.1016/j.jallcom.2008.08.080
ISSN: 0925-8388
DOI: 10.1016/j.jallcom.2008.08.080
Volume: 475
Issue: 1-2
Begin Page: L46
End Page: L49
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