The feasibility study of establishing the PM SOP for semiconductor machines utilizing risk assessment techniques
Hai Pin Lee
Dr. Yi Chang
依據採用此種風險評估方法推估建立其他半導體機台PM SOP應是可行性的，達到“穩定PM 品質”及“人身安全”之雙贏境界。|
Chemicals used for semiconductor manufacturing are mostly highly volatile, poisonous, and inflammable. For this reason, semiconductor manufacturing plants are fraught with potential hazards of fires, explosions, poisoning, and suffocation. Once equipment malfunction or chemical leakage or fire occurs due to careless maintenance, casualties are likely to incur and may cause enormous amounts of losses. As a result, there is an urgent need to establish a set of effective PM SOP for semiconductor machines to minimize the threat brought about by various hazards. A preliminary study is conducted on the chemical cleaning bench which is proved to be more hazardous than others. The hazards and risk levels involved when maintaining and/or repairing wet chemical bench is studied.The PM SOP was established on the wet cleaning bench that conforms with safety standards.The PM SOP standard was performed to evaluate whether the PM SOP can effectively reduce the chancesof accidents.The occurence of the accidents was greatly reduced after the PM SOP procedures was performed on the wet cleaning bench. We believe these risk assessment techniques can also be utilized to establish the PM SOP for other equipments. In this study , it is proved that proper PM SOP can significantly reduce the chances of the occurance of accidents at equipment repairing and maintenance. The enforcement of PM SOP can be beneficial for the entire semiconductor industry and create a win-win situation for both PM quality and human safety.
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