The Designs and Applications of the Novel Push-Pull RF MEMS Switch
Christina F. Jou
|關鍵字:||微波開關、推挽式射頻微機電開關、移相器;Microwave switch、Push-pull MEMS switch、Phase shifter|
The research is in consideration of the disadvantages of conventional microwave switches, that is, the large volume and unbearable weight. Moreover, the semiconductor switches execute worse performance in the high frequency domain. As a result, we now exploit the MEMS technology to implement the RF switches to broaden its application. Our design is inspired by the conventional push-pull MEMS RF switch and some improvements are achieved, i.e., the simpler control circuits and higher occupational density. Our novel MEMS RF switch possesses as low voltage as others ever do; besides, it is in the shape of seesaw-like. Based on the mentioned design considerations, the novel switch can control two signal paths by one switch unit; furthermore, it can be combined with the phase shifter to direct the phases of signals. Our thesis is built on the concepts of push-pull switches with the simulation under the frequency from 1GH to 10GHz by HFSS. Beside, we also take the advantages of Coventorware to simulate the stress conditions. Finally, we implement our design through MEMS process.
|Appears in Collections:||Thesis|