Application and fabrication of surface acoustic wave biosensor
|關鍵字:||表面聲波;生物感測元件;壓電薄膜;SAW;Biosensor;Piezoelectric Thin Film|
A surface acoustic wave biosensor fabricated by semiconductor manufacture process was developed, its application was tested. The surface acoustic wave biosensor is created by inter-digital transducers (IDTs) and photo-deposited on the surface of piezoelectric thin film. Surface acoustic wave exited by IDTs is used on bio-detection. Since its energy was concentrated on the film surface and it is mass sensitive when the wave propagates through samples. When propagation boundary had changed, the frequency and velocity of surface acoustic wave changed also. For application test, normal and cancer blood serums were dropped on the sensing zone of surface acoustic wave biosensor, and we found that cancer blood serum having high protein concentration caused more frequency shift than normal blood serum near the center-frequency of the device. We know as protein concentration increases, frequency shift of the device also increases.
|Appears in Collections:||Thesis|