Effects of Heat Dissipation for Workbench on Airflow in Unidirectional Flow Type Clean Room
Clean room had been widely used in various high tech industries. In the past two decades. So many researches had been carried out to study the flow field of different types of clean room. However, to the author’s knowledge, there were still very few researches devoted to the study of the effects of heat dissipation of workbench on the flow field in unidirectional flow type clean room. This research studies the heat dissipation effects on the airflow both numerically and experimentally. The STAR-CD commercial CFD software had been used for the numerical calculation of the flow field. The airflow field had also been measured by the 3-D ultrasonic anemometer. The experimental measurements are compared with that of numerical calculation. Results show that the optimum dimensionless distance is 0.217 as the dimensionless 0.435 height of workbench and the independent dimensionless distance is 0.783 between two ones. The manifest effect of nature convection is observed with decreasing the velocity of supply air in clean room. Thus, to avoid the nature convection effects, the air velocity of local region of workbench which generates heat is enhanced.