標題: 控擋片回收製程之改善方案的選擇
Selection of Alternatives for Improving Recycle Process of C/D Wafers
作者: 簡嘉賢
Chia-Shien Chien
巫木誠
Muh-Cherng Wu
工業工程與管理學系
關鍵字: 控片;擋片;清洗回收;基因演算法;邊際分配法;control wafer;dummy wafer;recycle cleaning;genetic algorithm;marginal allocation
公開日期: 2002
摘要: 控擋片回收製程之改善方案的選擇 研究生:簡嘉賢 指導教授:巫木誠 博士 國立交通大學工業工程與管理研究所 摘要 晶圓廠製造過程中,幾乎所有機台都會使用控擋片作為監測、維護機台環境的輔助工具。控擋片可藉由清洗回收、降級和研磨回收以重複使用,來減少全新控片的投入量。而目前研究中多為控擋片降級法則之改善,以降低全新控片投入量,該種研究屬於營運法則之改善,甚少探討有關清洗回收之體質改善的問題。 本研究將探討控擋片清洗回收製程改善時,應該優先選擇那些控擋片的清洗回收製程作改善和改善多少,可以讓全新控片投入量減少最多,以使改善成本發揮最大的效益。本研究透過基因演算法和邊際分配法之協助,可以針對不同的改善預算,找到近似最佳解的改善方案。在比較搜尋時間方面,邊際分配法遠較基因演算法來得快。 關鍵詞:控片、擋片、清洗回收、基因演算法、邊際分配法
lection of Alternatives for Improving Recycle Processes of C/D Wafers Student:Chia-Shien Chien Advisor:Dr. Muh-Cherng Wu Institute of Industrial Engineering National Chiao Tung University ABSTRACT Control/dummy (C/D) wafers are used to measure the process quality in semiconductor manufacturing. C/D wafers are reusable by recycle cleaning and can be downgraded to the downstream processes. Previous studies on C/D wafers aimed to reduce the use of C/D wafers by making appropriate downgrade decisions. Yet, the yield improvement in the recycle process C/D wafers is seldom explored. This research formulates a decision problem and proposes solution methods for the selecting the yield improvement alternatives in the C/D recycle processes. The decision problem is to determine the yield improvement targets for each recycle process in order to minimize the use of C/D wafers, under a given budget for yield improvement. The two solution methods involve a genetic algorithm and a marginal allocation algorithm. The two methods yield same solutions but the marginal allocation method is good in requiring much less computation. key word:control wafer, dummy wafer, recycle cleaning, genetic algorithm, marginal allocation
URI: http://140.113.39.130/cdrfb3/record/nctu/#NT910031028
http://hdl.handle.net/11536/69787
Appears in Collections:Thesis