標題: Characterizations of gallium-doped ZnO films on glass substrate prepared by atmospheric pressure metal-organic chemical vapor deposition
作者: Huang, Yen-Chin
Li, Zhen-Yu
Chen, Hung-hsin
Uen, Wu-Yih
Lan, Shan-Ming
Liao, Sen-Mao
Huang, Yu-Hsiang
Ku, Chien-Te
Chen, Meng-Chu
Yang, Tsun-Neng
Chiang, Chin-Chen
光電工程學系
Department of Photonics
關鍵字: Chemical vapor deposition (CVD);Electrical properties and measurements;Gallium;Optical properties;Scanning electron microscopy;Water;X-ray diffraction;Zinc oxide
公開日期: 31-Jul-2009
摘要: Ga-doped zinc oxide (ZnO:Ga) films were grown on glass substrate by atmospheric pressure metal-organic chemical vapor deposition (AP-MOCVD) using diethylzinc and water as reactant gases and triethyl gallium (TEG) as an n-type dopant gas. The structural, electrical and optical properties of ZnO:Ga films obtained at various flow rates of TEG ranging from 1.5 to 10 sccm were investigated. X-ray diffraction patterns and scanning electron microscopy images indicated that Ga-doping plays an important role in forming microstructures in ZnO films. A smooth surface with a predominant orientation of (101) was obtained for the ZnO:Ga film grown at a flow rate of TEG=7.5 sccm. Moreover, a lowest resistivity of 3.6 x 10(-4) Omega cm and a highest mobility of 30.4 cm(2) V(-1) s(-1) were presented by the same sample, as evaluated by Hall measurement. Otherwise. as the flow rate of TEG was increased, the average transmittance of ZnO:Ga films increased from 75% to more than 85% in the wavelength range of 400-800 nm, simultaneously with a blue-shift in the absorption edge. The results obtained suggest that low-resistivity and high-transparency ZnO films can be obtained by AP-MOCVD using Ga-doping sufficiently to make the films grow degenerate and effect the Burstein-Moss shift to raise the band-gap energy from 3.26 to 3.71 eV. (C) 2009 Elsevier B.V. All rights reserved.
URI: http://dx.doi.org/10.1016/j.tsf.2009.03.194
http://hdl.handle.net/11536/6928
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2009.03.194
期刊: THIN SOLID FILMS
Volume: 517
Issue: 18
起始頁: 5537
結束頁: 5542
Appears in Collections:Articles


Files in This Item:

  1. 000267182700026.pdf