Title: Freestanding high quality GaN substrate by associated GaN nanorods self-separated hydride vapor-phase epitaxy
Authors: Chao, C. L.
Chiu, C. H.
Lee, Y. J.
Kuo, H. C.
Liu, Po-Chun
Tsay, Jeng Dar
Cheng, S. J.
電子物理學系
光電工程學系
Department of Electrophysics
Department of Photonics
Keywords: aluminium compounds;gallium compounds;III-V semiconductors;nanofabrication;nanostructured materials;passivation;photoluminescence;semiconductor growth;semiconductor thin films;silicon compounds;vapour phase epitaxial growth;wide band gap semiconductors
Issue Date: 3-Aug-2009
Abstract: This work proposes a method for fabricating 2 in. freestanding GaN substrates of high crystallographic quality and low residual strain. Arrays of GaN nanorods with sidewalls coated with silicon dioxide (SiO(2)) were randomly arranged on the sapphire substrate as a growth template for subsequent hydride vapor-phase epitaxy (HVPE). The passivation of the sidewalls coated with SiO(2) prevents the coalescence of GaN grains in spaces between the rods, causing them to grow preferentially on the top of individual rods. The proposed method significantly improves GaN crystal quality and results in self-separation from the underlying host sapphire substrate due to the relaxation of thermal strains in the HVPE cooling-down process.
URI: http://dx.doi.org/10.1063/1.3195684
http://hdl.handle.net/11536/6833
ISSN: 0003-6951
DOI: 10.1063/1.3195684
Journal: APPLIED PHYSICS LETTERS
Volume: 95
Issue: 5
End Page: 
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