標題: An electro-thermally and laterally driven polysilicon microactuator
作者: Pan, CS
Hsu, WY
機械工程學系
Department of Mechanical Engineering
公開日期: 1-三月-1997
摘要: A novel electro-thermally and laterally driven microactuator made of polysilicon has been designed, fabricated, and tested. The operational principle is based on the asymmetrical thermal expansion of the microstructure with different lengths of two beams, but not based on the variable cross sections of the microstructure. A microgripper to demonstrate one possible application of the microactuator is fabricated and characterized. The input voltage of this design is less than 10 dc to produce 20 mu m displacement with about 0.6 mJ heat dissipation, and the maximum temperature is less than 600 degrees C. A gripping force up to 2.8 mu N can be generated. Simulation results are compared with the experimental data and show good agreement. Some design parameters strongly influencing the performance of the microactuator are discussed also.
URI: http://dx.doi.org/10.1088/0960-1317/7/1/003
http://hdl.handle.net/11536/672
ISSN: 0960-1317
DOI: 10.1088/0960-1317/7/1/003
期刊: JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume: 7
Issue: 1
起始頁: 7
結束頁: 13
顯示於類別:期刊論文


文件中的檔案:

  1. A1997WT43900003.pdf