標題: An efficient approach to cross-fab route planning for wafer manufacturing
作者: Wu, Muh-Cherng
Shih, Chang-Fu
Chen, Chen-Fu
工業工程與管理學系
Department of Industrial Engineering and Management
關鍵字: Dual-fab;Cross-fab route;Route planning;Capacity-sharing;Genetic algorithm;Linear programming
公開日期: 1-十月-2009
摘要: This paper proposes an efficient approach to solve a cross-fab route planning problem for semiconductor wafer manufacturing. A semiconductor company usually adopts a dual-fab strategy. Two fab sites are built neighbor to each other to facilitate capacity-sharing. A product thus may be produced by a cross-fab route; that is, some operations of a product are manufactured in one fab and the other operations in the other fab. This leads to a cross-fab routing planning problem, which involves two decisions-determining the cut-off point of the cross-fab route and the route ratio for each product-in order to maximize the throughput subject a cycle time constraint. A prior study has proposed a method to solve the cross-fab route planning problem; yet it is computationally extensive in solving large scale cases. To alleviate this deficiency, we proposed three enhanced methods. Experiment results show that the best enhanced method could significantly reduce the computational efforts from about 13 h to 0.5 h, while obtaining a satisfactory solution. (C) 2009 Elsevier Ltd. All rights reserved.
URI: http://dx.doi.org/10.1016/j.eswa.2009.02.008
http://hdl.handle.net/11536/6639
ISSN: 0957-4174
DOI: 10.1016/j.eswa.2009.02.008
期刊: EXPERT SYSTEMS WITH APPLICATIONS
Volume: 36
Issue: 8
起始頁: 10962
結束頁: 10968
顯示於類別:期刊論文


文件中的檔案:

  1. 000267179500020.pdf