Title: A Web Services-Based Collaborative Planning, Forecasting, and Replenishment (CPFR) Framework for Managing Spare Parts of Semiconductor Equipment
Authors: Chen, Mu-Chen
Chen, Kai-Ying
Hsu, Ming-Fu
Yeh, Cheng-Ta
運輸與物流管理系 註:原交通所+運管所
Department of Transportation and Logistics Management
Keywords: Collaborative planning;forecasting and replenishment (CPFR);e-diagnostics;e-maintenance;e-manufacturing;semiconductor industry;spare parts;web services
Issue Date: 1-Nov-2009
Abstract: In a semiconductor foundry, equipment failure has long been recognized as a major cause of unpredicted breakdown which results in an excessive production loss. Equipment maintenance management is one of the essential tasks in semiconductor manufacturing. Due to the prosperity of Internet and IT, e-diagnostics and e-maintenance through the web have become important applications in the semiconductor industry. Web services (WSs) can assist the data integration in heterogeneous e-facturing systems to support faster and remote maintenance functions. In this paper, a WS-based collaborative planning, forecasting and replenishment (CPFR) framework, namely WS-CPFR, is developed to collaboratively manage the logistics activities of spare parts in semiconductor equipment between equipment suppliers and semiconductor factories.
URI: http://dx.doi.org/10.1109/TSM.2009.2028217
http://hdl.handle.net/11536/6538
ISSN: 0894-6507
DOI: 10.1109/TSM.2009.2028217
Journal: IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING
Volume: 22
Issue: 4
Begin Page: 596
End Page: 600
Appears in Collections:Articles


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