Title: 用一嶄新的結構構建熱動式微致動器及微應變感測器
= A novel microstructure for constructing thermally driven microactuators and micro strain sensors
Authors: 潘吉祥
徐文祥
機械工程學系
Issue Date: 1997
URI: http://140.113.39.130/cdrfb3/record/nctu/#NT866489109
http://hdl.handle.net/11536/63696
Appears in Collections:Thesis