標題: Simulation and testing of pollutant dispersion during preventive maintenance in a cleanroom
作者: Shih, Hui-Ya
Huang, Shih-Hsuan
Li, Shou-Nan
Chen, Sheng-Chieh
Tsai, Chuen-Jinn
環境工程研究所
Institute of Environmental Engineering
關鍵字: Airborne molecular contamination;Gas sensors;Cleanroom;Preventive maintenance
公開日期: 1-十二月-2009
摘要: Sulfur hexafluoride (SF(6)) of >99.9% purity was artificially released to simulate the emission sources in the etching-thin film area of a working cleanroom in a semiconductor fab at the rate of 492 g/h. Three mobile Fourier transform infrared spectrometers (FTIRs, detection limit: 10 ppb) were used simultaneously to measure the real time SF6 concentrations at different locations of the cleanroom. A three-dimensional numerical model was also used to predict the unsteady gas concentration distribution and the results were compared with the experimental data. Due to high dilution of the pollutant in the cleanroom, it is found that the current gas sensors may not be sensitive enough and a better monitoring system and strategy is needed to protect workers from injury and to ensure good product yield. After comparison with the validated numerical results. the well-mixed model is found to predict the peak pollutant concentrations within a reasonable range which is 0.34-1.33 times the experimental values except when the monitored distance is very close to the release point. The well-mixed model is shown to be capable of predicting a reasonable attainable maximum concentration once a pollutant leaks in the cleanroom. (C) 2009 Elsevier Ltd. All rights reserved.
URI: http://dx.doi.org/10.1016/j.buildenv.2009.03.018
http://hdl.handle.net/11536/6348
ISSN: 0360-1323
DOI: 10.1016/j.buildenv.2009.03.018
期刊: BUILDING AND ENVIRONMENT
Volume: 44
Issue: 12
起始頁: 2319
結束頁: 2326
顯示於類別:期刊論文


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