標題: Silicon Nitride Nanopillars and Nanocones Formed by Nickel Nanoclusters and Inductively Coupled Plasma Etching for Solar Cell Application
作者: Sahoo, Kartika Chandra
Lin, Men-Ku
Chang, Edward-Yi
Tinh, Tran Binh
Li, Yiming
Huang, Jin-Hua
材料科學與工程學系
電子工程學系及電子研究所
Department of Materials Science and Engineering
Department of Electronics Engineering and Institute of Electronics
公開日期: 1-Dec-2009
摘要: The external quantum efficiency of solar cells can be improved by using textured surface with minimum reflection. We have fabricated nanopillars and nanocone structures on silicon nitride surface by means of self-assembled nickel nano particle masks with single step inductively coupled plasma (ICP) ion etching and double step ICP etching, respectively. Thus, sub-wavelength nanopillar and nanocone-like structures displaying low reflectance were obtained readily without the need for any lithography equipment. The formation mechanism of nanopillar and nanocone like structures fabricated on silicon nitride surface has been discussed. The relationship of etching time with structure height and average reflectance spectra has been drawn. (C) 2009 The Japan Society of Applied Physics
URI: http://dx.doi.org/10.1143/JJAP.48.126508
http://hdl.handle.net/11536/6341
ISSN: 0021-4922
DOI: 10.1143/JJAP.48.126508
期刊: JAPANESE JOURNAL OF APPLIED PHYSICS
Volume: 48
Issue: 12
結束頁: 
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