The application and improvement of waste solvent reclaim system in TFT-LCD FAB
Dr. Chang Yi
|關鍵字:||薄膜電晶體液晶顯示器;化學品;廠務系統;有機溶劑回收;TFT-LCD;chemical;facility system;organic solvent reclaim|
The photoelectric industry is considered as the star in the future industry at Taiwan, every factory of the especially in Thin Film Transistor Liquid Crystal Display (TFT-LCD) has an optimistic view of the note-book computer and liquid crystal TV (LCD TV) in the future, expand the factory and increase production with higher speed, also drive and visit the industry to develop at home from head to foot at the same time. The process of TFT-LCD and integrated circuit (IC) though some similar, the size of glass is enlarged progressively, also increase to the total amount of every chemicals that is used in step, compare the area of glass with G5 of TFT-LCD with 12-inch wafer, the TFT-LCD is about 20 times greater than 12-inch wafer. How to reduce the total amount of chemicals, has already become the problem deeply concerned of every factory, so various kinds of chemistry reclaim system are already apply to TFT-LCD factory gradually, besides reducing the manufacturing cost, and also reduce the chemical offal and emerge, has made suitable contribution to the thing that the factory saved the expenses and resource continuous utilization both. The system of waste solvent reclaim system that this document introduces is the wide regenerated resources equipment used at present. When TFT-LCD factory is in the new factory of planning, almost the entire factory designs the next generation, only a few factory on the setting-up of the factory building of the same generation repeatedly. So in the new factory initial stage, every design parameter is except that the equipment manufacturer offer, can only is it estimate in advance to make in accordance with existing data, what this text discuss waste solvent reclaim system planning like this also. The main design parameter of waste solvent reclaim system are waste solvent quantity and composition that submitted from the equipment department, after waiting for the FAB of setting up, equipment machine of factory building to operate formally, the design parameter of estimating in advance in initial stage, make parameter changed is it adjust to need, waste solvent content already difference from estimated data while operating actually. So the reclaim system needs improving, by reaching the best efficiency of retrieving. What this text introduce waste solvent, come from etching process, is the photo resist stripper. The reclaim system mainly for deal with the waste stripper, remove of moisture and impurity, adjust components via concentration control unit, then supply to the equipment, reach the purpose to recycle. By probing into TFT-LCD process and the effect of photo resist stripper, understand that application of reclaim system, and discuss that it is in the difference between planning and actual operation to reclaim system, and the achievement reached after improving, and propose the suggestion of follow-up improvement.
|Appears in Collections:||Thesis|