標題: Chemical Precursor for the Synthesis of Diamond Films at Low Temperature
作者: Tiwari, Rajanish N.
Chang, Li
材料科學與工程學系
Department of Materials Science and Engineering
公開日期: 2010
摘要: In this study, diamond films have been synthesized on adamantane-coated (100) Si substrates at 530 degrees C by microwave plasma chemical vapor deposition from a gaseous mixture of methane and hydrogen. Scanning electron microscopy, Raman spectroscopy, and X-ray diffraction were employed to characterize the carbon chemical species on the Si substrate from adamantane into diamond. These measurements provide definitive evidence for formation of high-crystalline diamond film on Si substrate without any other pretreatments. Moreover, the possible mechanisms for the diamond formation are presented. (C) 2010 The Japan Society of Applied Physics
URI: http://hdl.handle.net/11536/6117
http://dx.doi.org/10.1143/APEX.3.045501
ISSN: 1882-0778
DOI: 10.1143/APEX.3.045501
期刊: APPLIED PHYSICS EXPRESS
Volume: 3
Issue: 4
顯示於類別:期刊論文


文件中的檔案:

  1. 000277297000018.pdf