標題: Precision Measurement of Sub-50 nm Linewidth by Stitching Double-Tilt Images
作者: Pan, Shan-Peng
Liou, Huay-Chung
Chen, Chao-Chang A.
Chen, Jr-Rung
Liu, Tzong-Shi
機械工程學系
Department of Mechanical Engineering
公開日期: 2010
摘要: In this paper we present a stitching double-tilt image method (SDTIM) to measure sub-50 nm linewidth and to evaluate the measurement uncertainty. The SDTIM employs a parallel image method using a tilt mechanism to obtain two side scans. Moreover, the stitching method is used for linewidth determination. Experiments were performed by atomic force microscopy (AFM) using an ultrasharp tip, whose radius is smaller than 5 nm. The sample rotation axis is set parallel to the top surface of the sample in order to reduce the problem of measurement position variation. Experimental results show that the developed SDTIM can be used with an uncertainty of less than 5 nm at a confidence level of 95%. (C) 2010 The Japan Society of Applied Physics
URI: http://hdl.handle.net/11536/6044
http://dx.doi.org/10.1143/JJAP.49.06GK06
ISSN: 0021-4922
DOI: 10.1143/JJAP.49.06GK06
期刊: JAPANESE JOURNAL OF APPLIED PHYSICS
Volume: 49
Issue: 6
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