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dc.contributor.authorHou, HMen_US
dc.contributor.authorSheen, CSen_US
dc.contributor.authorWu, CYen_US
dc.date.accessioned2014-12-08T15:01:09Z-
dc.date.available2014-12-08T15:01:09Z-
dc.date.issued1998-01-01en_US
dc.identifier.issn0018-9383en_US
dc.identifier.urihttp://dx.doi.org/10.1109/16.658831en_US
dc.identifier.urihttp://hdl.handle.net/11536/59-
dc.description.abstractAn efficient method is presented to model the parasitic three-dimensional (3-D) capacitance of VLSI multilevel interconnections. Based on the boundary-finite-element method (BFEM) of integral formulation, arbitrary triangle elements on the surface of conductors for charge distribution are used to efficiently calculate capacitances of both parallel conductors and complicated configurations such as crossing Lines, corners, contacts, and their combinations, Using an adaptive multilevel Green's function and low-order polynomials as shape function, we apply the Galerkin principle over finite elements, and most of the surface integrals of charge distribution can be evaluated analytically and the singular integrals can be eliminated by choosing proper coordinate transformation, Moreover, an even less complex and more general method for arbitrary geometry configuration of multilevel interconnection lines is proposed in order to Link with the finite element pre-processor in present CAD tools.en_US
dc.language.isoen_USen_US
dc.subjectBFEMen_US
dc.subjectGreen's functionen_US
dc.subjectinterconnectionen_US
dc.subject3-D capacitanceen_US
dc.subjectVLSIen_US
dc.titleA novel modeling technique for efficiently computing 3-D capacitances of VLSI multilevel interconnections BFEMen_US
dc.typeArticleen_US
dc.identifier.doi10.1109/16.658831en_US
dc.identifier.journalIEEE TRANSACTIONS ON ELECTRON DEVICESen_US
dc.citation.volume45en_US
dc.citation.issue1en_US
dc.citation.spage200en_US
dc.citation.epage205en_US
dc.contributor.department電子工程學系及電子研究所zh_TW
dc.contributor.departmentDepartment of Electronics Engineering and Institute of Electronicsen_US
dc.identifier.wosnumberWOS:000071225200027-
dc.citation.woscount7-
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