標題: Deposition of indium tin oxide films on polycarbonate substrates by radio-frequency magnetron sputtering
作者: Wu, WF
Chiou, BS
電子工程學系及電子研究所
Department of Electronics Engineering and Institute of Electronics
關鍵字: coatings;indium oxide;optical properties;sputtering
公開日期: 20-四月-1997
摘要: Indium tin oxide (ITO) films have been deposited onto polycarbonate (PC) substrates by radio frequency (rf) magnetron sputtering. The influence of the oxygen content during sputtering on the film morphology, and the electrical and optical properties of the films have been investigated. Both the refractive index and the extinction coefficient decrease with increasing oxygen content. In this study, the figures of merit T-10/R-sh of the films are higher than those for low-temperature sputtered films reported in the literature. (C) 1997 Elsevier Science S.A.
URI: http://hdl.handle.net/11536/596
ISSN: 0040-6090
期刊: THIN SOLID FILMS
Volume: 298
Issue: 1-2
起始頁: 221
結束頁: 227
顯示於類別:期刊論文


文件中的檔案:

  1. A1997XH32400038.pdf