Title: Deposition of indium tin oxide films on polycarbonate substrates by radio-frequency magnetron sputtering
Authors: Wu, WF
Chiou, BS
電子工程學系及電子研究所
Department of Electronics Engineering and Institute of Electronics
Keywords: coatings;indium oxide;optical properties;sputtering
Issue Date: 20-Apr-1997
Abstract: Indium tin oxide (ITO) films have been deposited onto polycarbonate (PC) substrates by radio frequency (rf) magnetron sputtering. The influence of the oxygen content during sputtering on the film morphology, and the electrical and optical properties of the films have been investigated. Both the refractive index and the extinction coefficient decrease with increasing oxygen content. In this study, the figures of merit T-10/R-sh of the films are higher than those for low-temperature sputtered films reported in the literature. (C) 1997 Elsevier Science S.A.
URI: http://hdl.handle.net/11536/596
ISSN: 0040-6090
Journal: THIN SOLID FILMS
Volume: 298
Issue: 1-2
Begin Page: 221
End Page: 227
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