Title: Mechanical and optical properties of ITO films with anti-reflective and anti-wear coatings
Authors: Wu, WF
Chiou, BS
電子工程學系及電子研究所
Department of Electronics Engineering and Institute of Electronics
Issue Date: 1-May-1997
Abstract: In this study, radio frequency (rf) magnetron sputtered ITO films were coated with reactively sputtered SiO2 films. The microhardness, pull-off strength, scratch adhesion strength, optical transmittance and reflectance of the SiO1/ITO/substrate system are investigated. Coating of SiO2 enhances both the hardness and pull-off strength and reduces the scratch critical load of the system. The optical transmittance in the visible range is also improved with the addition of SiO2.
URI: http://hdl.handle.net/11536/577
ISSN: 0169-4332
Journal: APPLIED SURFACE SCIENCE
Volume: 115
Issue: 1
Begin Page: 96
End Page: 102
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  1. A1997WX17800013.pdf